SEMI International Standards
SEMI New Activity Report Form (SNARF)

Activity Number: 5690
SNARF for: Revision to SEMI AUX023-1113, Overview Guide to SEMI Standards for 450 mm Wafers

Originating Global Technical Committee: Physical Interfaces & Carriers
Originating Technical Committee Region: Japan
Task Force in which work is to be carried out: International 450 mm Physical Interfaces & Carriers

1. Rationale: This document is intended to help users and suppliers of 450mm carriers and production equipment to understand the complex interdependence among the SEMI standards for 450mm Wafer, Carrier and physical interface and to determine which standards apply to which products.
Rate the Estimated Effect on the Industry
4: Slight effect or effect not determinable

Rate the Estimated Technical Difficulty of the Activity
I: No Difficulty - Proven concepts and techniques exist or quick agreement anticipated

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:

This document describes how the SEMI standards for 450mm work to together.This document is the following configuration.
1. Publish list
2. Overview for 450mm SEMI standards
3. 450mm/300mm Comparison table
4. Overview of 300mm SEMI standards (Reference).

b: Expected result of activity
Auxiliary Information

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 12/05/2013b. 1st Draft by: 12/05/2013
c. Preballot by: d. Technical Ballot by: 03/01/2014
e. Committee Approval By:04/01/2014

Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline

Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on December 5, 2013