SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 04/01/2013Revised (if Applicable): 04/02/2014

Document Number: 5589
SNARF for: Revisions to:
- SEMI E5, SEMI Equipment Communications Standard 2 Message Content (SECS-II);
- SEMI E40.1, SECS-II Support for Processing Management Standard;
- SEMI E90.1, Specification for SECS-II Protocol Substrate Tracking;
- SEMI E94.1, Specification for SECS-II Protocol for Control Job Management (CJM);
- SEMI E109, Specification for Reticle and Pod Management (RPMS);
- SEMI E109.1, Specification for SECS-II Protocol for Reticle and Pod Management (RPMS); and
- SEMI E116.1, Specification for SECS-II Protocol for Equipment Performance Tracking (EPT);

Originating Global Technical Committee: Information & Control
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: GEM 300 Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
SEMI Regulations, March 2013 version, section 15.1 states:
“…Published Documents should be written in a such way that the … reproduction of copyrighted items is not necessary.”

SEMI Required Elements June 2, 2010 states the following:
”When possible, SEMI Standards and Safety Guidelines should be written in such a way that patented technology or copyrighted information is not necessary to use, comply with, or implement the Standard or Safety Guideline.”

The current 0611 E30 publication indicates that SECS Message Language™ is trademarked, and that SML® a registered trademark. The PEER Group has made it known to the NA I&CC that “SML Notation” is copyrighted.

In order to follow SEMI’s policy to avoid copyrighted material in the standards, all references to SML and SML Notation will be removed from SEMI E30 and related SEMI Standards. SML and SML Notation are not necessary to use.


b. Estimate effect on industry.
4: Slight effect or effect not determinable
Sector or Company Information:

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
References and content related to “SML” and “SML Notation” will be removed from: E5, E40.1, E90.1, E94.1, E109, E109.1, E116.1.

b: Expected result of activity
Line-item revision to two or more existing Standards or Safety Guidelines

For a new Subordinate Standard, identify the Primary Standard here:




For Standards, identify the Standard Subtype below:


Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 04/01/2014b. 1st Draft by: 04/15/2014
c. (Optional) Informational Ballot by: 05/01/2014d. Letter Ballot by: 05/09/2014
e. TC Chapter Approval By:07/10/2014

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
Global Information & Control Committee
Global PV Automation Committee
Global HB-LED Committee
Global FPD Factory Automation Committee

Intercommittee ballots will be issued: PV Automation, HB-LED, FPD Factory Automation

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:


Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:


If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):


c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
SEMI Staff Notes:
- SNARF revised in 10/30/2013 to include additional identified standards possibly affected by SML/SML Notation copyright matter. Revisions were also made to the rationale, scope, and timeline sections.

- SNARF revised again in 04/02/2014 to reduce # of Standards to be revised:
From Brian Rubow (Cimetrix) on April 9:
There are, by our count, 17 standards that need SML removed. That is too much for one ballot, so we decided to break it down into three phases.

- In phase 1, remove SML from standards that only use the SML Notation mnenomics (U1, U4, etc). This seemed like the easiest of the steps.
- Phase 2, remove SML from the standards that also have some message scenarios that use an SML like notation. It will really help to have ballot 5520 pass before starting this phase, so that we have a standard notation to replace the existing notation.
- Phase 3, remove SML from E30. Unfortunately, 5589 failed the first time largely because a couple voters felt like we could not remove mentions of SML from E30 until all standards that reference SML have it removed first. By that logic, E30 has to be last.

Nevertheless, if Phase 1 is successful, then we could try phases 2 and 3 at the same time. We plan it to create another SNARF or two at SEMICON West.

Original list: E5, E30, E30.1, E40.1, E82, E87.1, E88, E90.1, E91, E94.1, E109, E109.1, E116.1, E122, E122.1, E123, E123.1, E138, E153

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8. TC Member Review:


Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS04/03/2013
Recorded in TC Minutes04/03/2013

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on