SEMI International Standards TASK FORCE ORGANIZATION FORM (TFOF)

Date Prepared: 10/15/2003

Revised (if Applicable):

Name of Task Force (TF): International Annealed Si Wafer Task Force

Global Technical Committee: Silicon Wafer

Originating Technical Committee Region: International

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1. Charter: (State the objective of the proposed TF.)
In industry, many IC manufacturers use annealed silicon wafers. At this time, there is no standard to which annealed wafers are created. Purpose of this activity is to support Annealed Silicon Wafer Task Force in NA for the standardization. In industry, many IC manufacturers use annealed silicon wafers. To create either guides or specifications concerning annealed silicon wafers.
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2. Scope: (Define the specific activities that the TF will conduct.)
For example, the important characteristic of the annealed wafer and the effective evaluation methods should be specified.
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3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
NA Annealed Si Wafer Task Force
Japan Annealed Si Wafer Task Force.
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4. Formation Date:(TF formed on)

Task Force formed on: 10/15/2003
Task Force approved by Committee/GCS on: 11/05/2003

5. Comments
None.