SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 03/29/2023Revised (if Applicable):

Document Number: 7065
SNARF for: Line Item Revision to SEMI E172-0320, Specification for SECS Equipment Data Dictionary (SEDD)

Originating Global Technical Committee: Information & Control
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: GEM 300 Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
SEMI E172 describes the SECS-II interface for the manufacturing equipment, including variables, collection events and alarms. Equipment users can take this content to develop factory software to communicate with the manufacturing equipment.

Some gaps have been identified in SEMI E172 as implementations start to consume SEDD information.

1. The SEDD schema does not have a way to identify defined alarms (i.e. no Alarm Name supported) This makes it hard to associate the alarm element with expected functionality. The CollectionEvents, DataVariables, StatusVariables, EquipmentConstants, etc. entities have Name elements defined.

2. The SEDD schema file sometimes expects an element to be present even when there are no items applicable (element has an empty list) and sometimes allows the element not to be present at all. The schema should be consistent in its expectations.

3. For SEDD to be useful for 300mm tools, there needs to be a standardized naming for entities defined by the 300mm Standards. (For example, which event name corresponds to SEMI E40 Process Job State Transition 01. PRJOBSMTrans01? ProcessJobSMTrans01?) This problem has been addressed in the EDA standards by SEMI E164, that defines requirements on how parameters, events and exceptions are defined on the equipment if it implements a SEMI Standard.



b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information: Anyone implementing or using E172 SEDD files

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
As part of the work on this Line Item Revision, the task force will investigate:

• Adding a Name element to the Alarm object and Default Report Definition object to ensure the factory software has the information it needs to correctly identify those entities.
• Review if there is other information about SECS-II interface that factory software would need to successfully interface with the manufacturing equipment without getting information from other sources.
• Review if schema file handles situations where no such entities exist consistently. For example,
- If a collection event does not have any valid DVs, the VALIDDVS element is required and specifies an empty list.
- If the collection event does not have any ECs or SVs relevant to the event, the implementer is not required to include the RelevantVariables element.

• Add a new property to define “well known names” to variables, collection events and alarms identified by other SEMI Standards (e.g., SEMI 300mm standards) are named if they are included in the SEDD.

• Update schema file comments to help clarify expected behavior.

• Any other changes to address features or defects, or issues with the Style Guide raised by Task Force members during the development and review of the proposed changes related to these line item topics. Significant changes in scope still require a SNARF revision in compliance with SEMI Regulations


b: Expected result of activity
Line-item revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:


Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials, Addition of one or more Appendices or Complementary Files to an existing Standard or Safety Guideline, Addition of one or more Related Information sections or Various Materials to an existing Standard or Safety Guideline

For Standards, identify the Standard Subtype below:
Specification

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 04/01/2023b. 1st Draft by: 05/01/2023
c. (Optional) Informational Ballot by: d. Letter Ballot by: 05/20/2023
e. TC Chapter Approval By:07/30/2023

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a.
List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)


b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FORthe use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FORwill incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
None.

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8. TC Member Review:
is not required for this SNARF.

Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS05/09/2023
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on