SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 10/16/2014Revised (if Applicable):

Document Number: 5821
SNARF for: New Standard: Specification for Energy Savings Mode Communication between Semiconductor Equipment and Sub-Systems

Originating Global Technical Committee: Information & Control
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Energy Saving Equipment Communication Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
The industry has just approved a new standard for energy saving communication between the factory and the semiconductor equipment. However, there is no standard communication between semiconductor equipment and sub-systems (e.g., vacuum pumps and abatement systems) capable of reduced energy operation. A standard for commanding and communicating energy conservation status between equipment and such sub-systems is needed. Many sub-systems are capable for a reduced energy operation but implementations have stalled by the absence of standards to enable communication and exchange of information between various manufactures of sub-systems and semiconductor equipment. Currently, there are proprietary solutions used to interface and communicate energy conservation information within equipment and subsystems in a non-standard way. The purpose of this activity is to define energy conservation communication between equipment and sub-systems in a standard way.


b. Estimate effect on industry.
4: Slight effect or effect not determinable
Sector or Company Information:

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
In Scope:
* Definition of a protocol independent common energy conservation communication and state machine behavior between equipment and sub-systems in alignment with S23 and E167, whereby E167 passes sleep mode request from the host to equipment and this standard handles the synchronization of this request or analogous request to the sub fab equipment when the equipment has made the decision to do so.

- Requirements
- State and terminology definitions
- Commands
- Data parameters

Not in Scope:
* Supplier IP or art
- Tool, and process specific implementation
- Examples are:
> Tool process specific transitions or recovery
> Process and performance monitoring and criteria


b: Expected result of activity
New Standard or Safety Guideline (including replacement of an existing Standard or Safety Guideline)

For a new Subordinate Standard, identify the Primary Standard here:




For Standards, identify the Standard Subtype below:


Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 10/01/2014b. 1st Draft by: 11/04/2014
c. (Optional) Informational Ballot by: d. Letter Ballot by: 04/01/2015
e. TC Chapter Approval By:07/05/2015

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a.
List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
I&C Committee (Japan, Taiwan, and Korea)
Equipment Automation Committee (Europe)

Intercommittee Ballots will be issued: EHS

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:


Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:


If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):


c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:



NOTE FORthe use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FORwill incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
This activity will be conducted under the Energy Saving Equipment Communication Task Force.

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8. TC Member Review:


Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS11/03/2014
Recorded in TC Minutes11/03/2014

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on