SEMI International Standards
Date Prepared: 04/15/2019
Revised (if Applicable):

Name of Task Force (TF): Trace Metal Analysis for High Pure IPA Task Force

Global Technical Committee: Liquid Chemicals
Originating Technical Committee Region: Japan

1. Charter: (State the objective of the proposed TF.)
Develop a standard of the trace metal analysis method for high pure IPA which is suitably used in the liquid phase.
2. Scope: (Define the specific activities that the TF will conduct.)
To develop the trace metal analysis method especially on iron for high pure IPA.

Define the analytical conditions and procedures for the trace metal analysis on iron.

The following areas are to be addressed:
Determine the trace iron concentration range
Determine the conditions such as bottle, sampling, acid addition, concentration, analysis, etc.
Determine the procedures such as sampling, acid addition, concentration, analysis, etc.
Determine the method of sampling without contamination and adsorption loss
Determine the description of the test result

3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
NA Liquid Chemical Committee
Chemical Analytical Methods TF

4. Formation Date:(TF formed on)

Task Force formed on: 04/15/2019
Task Force approved by Committee/GCS on: 04/15/2019