SEMI International Standards TASK FORCE ORGANIZATION FORM (TFOF)

Date Prepared: 03/04/1999

Revised (if Applicable): 02/08/2002

Name of Task Force (TF): Pressure Measurement Task Force

Global Technical Committee: Gases

Originating Technical Committee Region: North America

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1. Charter: (State the objective of the proposed TF.)
To develop a series of documents related to pressure measurement devices used in the semiconductor industry to include test methods, performance definitions, and performance test methods.
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2. Scope: (Define the specific activities that the TF will conduct.)
The activity would form a task force of knowledgeable industry leaders who would review existing documents and data in order to develop a series of industry-specific standards related to pressure measurement devices (tranducers and guages).
The first document (s) would establish standard test methods for the pressure measurement devices used in the semiconductor industry.
Once consensus is acheived on test methods, performance specifications can be developed for these components.
Additional consideration could include development of specifications or guide for the dimensions and connections of pressure gauges.
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3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)

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4. Formation Date:(TF formed on)

Task Force formed on:
Task Force approved by Committee/GCS on:

5. Comments
None.