SEMI International Standards TASK FORCE ORGANIZATION FORM (TFOF)

Date Prepared: 12/16/1999

Revised (if Applicable):

Name of Task Force (TF): S6 Revision Task Force

Global Technical Committee: EH&S

Originating Technical Committee Region: North America

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1. Charter: (State the objective of the proposed TF.)
Update S6 in content to reflect the current consensus on recommended practices for equipment ventilation and in form to conform to the present SEMI Standards Editorial Guidelines. (The degree of change to the technical content will be identified in the initial discussions and ballot.)
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2. Scope: (Define the specific activities that the TF will conduct.)
a) Prepare first draft by editing the published S6-93.
b) Obtain comments and suggestions at TF meeting during Winter 00 meetings.
c) Ballot document as concurred by TF at, or by teleconference shortly after, that session.
d) Review rejections and comments in response to that ballot, make recommendations to the Committee for their disposition.
Repeat (c) and (d) as necessary until revised S6 is approved.
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3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)

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4. Formation Date:(TF formed on)

Task Force formed on: 03/02/2000
Task Force approved by Committee/GCS on:

5. Comments
None.