SEMI International Standards
Date Prepared: 10/28/2013
Revised (if Applicable):

Name of Task Force (TF): Permeation Tubes for Trace Moisture Calibration

Global Technical Committee: Gases
Originating Technical Committee Region: Europe

1. Charter: (State the objective of the proposed TF.)
In the global marketplace there is a need to monitor for trace concentrations of water in a variety of gases where water vapor in the process gases can affect product quality and/or yield. Examples include such diverse areas as the production of microelectronic devices, the manufacture of high grade polymers, and welding and heat treating of high alloy components subject to extreme stresses such as those found in Jet aircraft engines. Unfortunately there are no absolute analytical systems for moisture that can be applied. Often the instrument response is not independent of the background gas and all are subject to some level of poisoning by other contaminants. This is especially true as concentrations go to the sub-ppm level. In some cases the monitor will cease to respond when exposed to a dry sample for an extended period. Thus there is a critical need for a generally applicable method of preparing trace concentration moisture standards, and particularly one that can be used in industrial ‘field’ conditions.
2. Scope: (Define the specific activities that the TF will conduct.)
Develop a consensus test method for trace moisture calibration of permeation tubes
3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)

4. Formation Date:(TF formed on)

Task Force formed on: 10/08/2013
Task Force approved by Committee/GCS on: 10/08/2013