SEMI International Standards
Date Prepared: 07/18/2007
Revised (if Applicable): 04/07/2008

Name of Task Force (TF): International 450 mm Physical Interfaces & Carriers

Global Technical Committee: Physical Interfaces & Carriers
Originating Technical Committee Region: International

1. Charter: (State the objective of the proposed TF.)
Preliminary Standards for 450mm factory interfaces that will enable development of 450mm tools as outlined by ISMI program and 450mm timeline in ITRS
* Enable availability of Si Shipping Box and in-fab carrier
* Enable availability of equipment interfaces
- Equipment implies Process tools, Metrology, AMHS, or any other equipment that may interface with the carrier

2. Scope: (Define the specific activities that the TF will conduct.)
Develop the requirements for:
* Si Shipping Box (Support activity of JA Shipping Box TF)
* In-fab Carrier
* Equipment to carrier interfaces
* Carrier (Hand-off interface, i.e., E84)

3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
NA, JA and EU Silicon Wafer Committee
NA and JA Information & Control
EU Equipment Automation Committee

4. Formation Date:(TF formed on)

Task Force formed on: 07/18/2007
Task Force approved by Committee/GCS on: 09/09/2007