SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: Revised (if Applicable):

Document Number: 6184
SNARF for: Revision to SEMI E135, Test Method for RF Generators to Determine Transient Response for RF Power Delivery Systems Used in Semiconductor Processing Equipment

Originating Global Technical Committee: Metrics
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: RF Measurements
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)


SEMI E135 was developed to define a standardized test method for measuring the transient response of RF generators used in semiconductor processing equipment. The existing version’s scope is limited to testing the RF generator into a nominal 50-Ω load. This represents a static load condition. The existing test will quantify the system’s transient response as a function of set point change as well as a function of the RF Enable and Disable command.

Semiconductor processing equipment provides a dynamic load condition to the RF generator with varying situations requesting for a change in output power, including testing into a high- and low-impedance load in addition to a nominal 50-Ω load that simulates plasma ignition conditions. An updated test procedure along with data collection tables will better help organize the presentation of the collected data.

The existing Standard is widely used and adopted by the industry. By including additional real-world testing conditions, the resulting revised Standard provides a more comprehensive approach for evaluating an RF generator’s response time.




b. Estimate effect on industry.
1: Major effect on entire industry or on multiple important industry sectors - identify the relevant sectors
Sector or Company Information:

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:

The proposed revision will introduce two additional load conditions (i.e., high and low impedance) in addition to the nominal 50Ω load that simulate operating conditions of a RF generator in the ignition process of a semiconductor processing equipment application. The requested change in output power can be a change in setpoint, a request to turn RF on or off, a change in a repetitive power pattern (e.g. changing a power level in a multi-level pulse waveform) or any other requested change that results in a change in output power. An updated test procedure along with data collect tables will better help organize the presentation of the collected data. Incorporation of these changes will result in a major revision of SEMI E135.


b: Expected result of activity
Major revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:


Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials

For Standards, identify the Standard Subtype below:
Test Method

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 04/05/2017b. 1st Draft by: 04/01/2017
c. (Optional) Informational Ballot by: d. Letter Ballot by: 04/01/2017
e. TC Chapter Approval By:04/01/2017

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
Global Metrics Committee

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:


If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
will NOT include reproduced copyrighted material



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
None.

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8. TC Member Review:
took place between (put dates below) before approval by the GCS, or

Member Review Start Date; 04/14/2017
Member Review End Date: 04/28/2017

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS05/15/2017
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on