SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 07/12/2016Revised (if Applicable):

Document Number: 6037
SNARF for: New Standard: Specification for Power Grid Harmonics Compatibility

Originating Global Technical Committee: Facilities
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Power Grid Harmonics Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
On fab power grids, distorted (harmonic) voltages and distorted (harmonic) currents are an increasingly urgent problem for tool vendors and fabs. The distortion can cause tool misoperation. It increases the burden on the fab’s power grid, in some cases to the point where additional tools cannot be installed. There is no standardized way for the tool vendors and the fabs to even communicate about their requirements, because existing IEEE and IEC standards focus on the utility/building AC power junction, but the critical problem for the semiconductor industry is at the fab/tool AC power junction, where the problems are quite different. And as tools require ever increasing power, and as fabs move towards “green” power sources, this power system harmonics compatibility problem will get worse.

b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information: Fabs that require high-power tools, fabs that have “green’ energy sources for their AC power grid

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
Write a SEMI Standard that specifies clear, precise communication methods between tool providers and fab facilities regarding harmonics considerations in 50/60 Hz power grids within the fab.

Specify limits (or communication methods about limits) on harmonic currents drawn by tools, and standardize requirements for tool immunity to voltage harmonics.

Specify limits (or communication methods about limits) on harmonic voltages provided by fabs, and standardize requirements for maximum fab power system impedances at the tool.

As required, propose guidance regarding measurement methods and compliance verification.

b: Expected result of activity
New Standard or Safety Guideline (including replacement of an existing Standard or Safety Guideline)

For a new Subordinate Standard, identify the Primary Standard here:

For Standards, identify the Standard Subtype below:

Miscellaneous (describe below):

3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 09/01/2016b. 1st Draft by: 09/01/2017
c. (Optional) Informational Ballot by: d. Letter Ballot by: 03/01/2018
e. TC Chapter Approval By:11/01/2018

4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters as needed.)
SEMI F47 (Voltage sag immunity)

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (see Procedure Manual 7):

c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

6. Intellectual Property Considerations:
a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:

b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:

NOTE FORthe use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations 16 must be followed.

NOTE FORwill incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

7. Comments, Special Circumstances:

8. TC Member Review:
took place between (put dates below ) before approval at the TC Chapter Meeting, or

Member Review Start Date; 06/27/2016
Member Review End Date: 07/08/2016

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (See Regulations 8.2.1)

9. SNARF Approval Dates:
TC Chapter or GCS07/12/2016
Recorded in TC Minutes07/12/2016


10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on

Attach Pictures and Files here:

[2016West] New - SNARF Specification for Power Grid Harmonics Compatibility.doc[2016West] New - SNARF Specification for Power Grid Harmonics Compatibility.doc