SEMI International Standards
SEMI New Activity Report Form (SNARF)

Activity Number: 5626
SNARF for: Revision to SEMI E154-0713, Mechanical Interface Specification for 450 mm Load Port AND to SEMI E166-0513, Specification for 450 mm Cluster Module Interface: Mechanical Interface and Transport Standard for addition of EFEM Pocket

Originating Global Technical Committee: Physical Interfaces & Carriers
Originating Technical Committee Region: North America
Task Force in which work is to be carried out: International 450 mm PIC TF & IPPI TF

1. Rationale:
Some process modules need higher or lower wafer transfer plane height that is outside the range of EFEM End effector’s range of vertical motion, which is constrained by the stroke and/or vertical position of the robot in the EFEM. As EFEM robot vertical motion must accommodates wafer transport from/to every slot in a FOUP on the Load port Option B
Proposed EFEM pocket volume will allow conventional robot to be able to have extra range of vertical motion by extending stroke or to be capable of servicing lower wafer transport height by lowerling the robot without changing Load port height requirement for Option B

Rate the Estimated Effect on the Industry
3: Major effect on a few companies - identify the relevant companies

Rate the Estimated Technical Difficulty of the Activity
I: No Difficulty - Proven concepts and techniques exist or quick agreement anticipated

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:

1. New section 11 in the E154 for EFEM pocket.
2. Add the related information in the E154.
3. Add the related information in the E166.
4. Correction the z105 of table1 in E154

b: Expected result of activity
Revision to an existing Standard/Guideline

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 06/26/2013b. 1st Draft by: 10/30/2013
c. Preballot by: d. Technical Ballot by: 08/29/2013
e. Committee Approval By:10/30/2013

Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline

Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, there is no alternative to the use of patented technology or copyrighted item(s)
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: Existing IP; no new IP.

Approval: Activity approved by Committee/GCS on December 5, 2013