SEMI International Standards
SEMI New Activity Report Form (SNARF)

Activity Number: 5492
SNARF for: New Standard: Guide for Ethylene Glycol

Originating Global Technical Committee: Liquid Chemicals
Originating Technical Committee Region: Europe
Task Force in which work is to be carried out: Solvents in Advanced Processes

1. Rationale: Since the application of solvents and mixtures of solvents has been diversified, and moved even to more critical applications, the purity requirements are becoming increasingly important.
There is a need for clear specifications related to the various levels of application.
A clear definition of the specification in conjunction with the technical road map requirements is beneficial for both the supplier and the user.
An agreement on the specifications result in a standardization and cost effective product.

Rate the Estimated Effect on the Industry
2: Major effect on an industry sector - identify the relevant sector

Rate the Estimated Technical Difficulty of the Activity
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

2. Scope:
a: Define the areas to be covered or addressed by this activity or document:
Guide for ethylene glycol used in the semiconductor industry

The following area need to be considered:
- The supplier as the manufacturing of high pure solvents (adaption existing manufacturing processes and introduction of new purification processes
- Improve the analytical capability for organic and inorganic impurities or other parameters
- The user: to make a selection on the specific grade of product.
- To act as a guide for solvent recycling programs.

b: Expected result of activity
New Standard

3. Projected Timetable for Completion:
a: General Milestones
a. Activity Start: 10/10/2012b. 1st Draft by: 02/01/2013
c. Preballot by: d. Technical Ballot by: 05/01/2013
e. Committee Approval By:10/01/2013

Safety Considerations:
The resulting document is expected NOT to be a Safety Guideline

Intellectual Property Considerations:
a. In complying with the standard or safety guideline to be developed, the use of patented technology or a copyrighted item(s) is NOT required
b. The body of the standard and any appendices or related information sections will NOT include copyrighted material

Comments, Special Circumstances: None.

Approval: Activity approved by Committee/GCS on October 10, 2012