SEMI International Standards
TASK FORCE ORGANIZATION FORM (TFOF)
Date Prepared:
07/10/2018
Revised (if Applicable):
Name of Task Force (TF):
300mm Tape Frame PI&C Task Force
Global Technical Committee:
Physical Interfaces & Carriers
Originating Technical Committee Region:
Japan
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1. Charter:
(State the objective of the proposed TF.)
This TF to define and develop the specification of FOUP that can hold 300mm tape frames, and related physical interface with the equipment. – Equipment implies process tool, metrology, AMHS, and any other equipment that may interface with the carrier.
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2. Scope:
(Define the specific activities that the TF will conduct.)
Develop the requirements for:
* 300mm tape frame FOUP
* Equipment to carrier interfaces
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3. Formal linkages with TFs in other Regions/Locales:
(Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
Physical Interfaces & Carrier Committee,
3D Packaging & Integration
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4. Formation Date:
(TF formed on)
Task Force formed on:
07/20/2018
Task Force approved by Committee/GCS on:
07/20/2018
5. Comments
None.
