SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 04/04/2023Revised (if Applicable):

Document Number: 7052
SNARF for: Line-Item Revision to SEMI F20-0706, Specification for 316L Stainless Steel Bar, Forgings, Extruded Shapes, Plate, and Tubing for Components used in General Purpose, High Purity and Ultra-high Purity Semiconductor Manufacturing Applications

Originating Global Technical Committee: Gases
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Materials of Construction of Gas Delivery Systems Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
1. Current F20 standard refers only to ASTM standards for metallurgical cleanliness requirements and material composition of 316L stainless steel. However, 316L stainless steel bars based on JIS (Japan Industrial Standard) that are slightly outside of ASTM A 276 composition specifications have widely been used for the gas distribution systems for semiconductor manufacturing equipment and facilities as an approved deviation. The differences between ASTM and JIS standards are minimum and we expect no negative impact (if not positive) on the quality of the materials. On the other hand, with this revision, F20 will reflect the current industry situation better and become more internationally inclusive standard.
Current F20 standard specifies the inclusion content of the material to be determined in accordance with ASTM E 45, Method A, but with ratings based on Plate III. Due to the revisions in ASTM E 45, there is no “Plate III” anymore and it was replaced by Plate I-A. To solve this problem, the proposed revision will reflect this change and replace “Plate III” by “Plate I-A”.



b. Estimate effect on industry.
3: Major effect on a few companies - identify the relevant companies
Sector or Company Information: This revision will give clarity to companies producing or using the materials based on JIS standards.

c. Estimate technical difficulty of the activity.
I: No Difficulty - Proven concepts and techniques exist or quick agreement is anticipated

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
1. Chemical compositions of all F20 materials (referencing ASTM standards versus JIS standard materials) used in general purpose, high purity, and ultra-high purity semiconductor manufacturing applications.
2. Inclusion content determination of all F20 materials used in general purpose, high purity, and ultra-high purity semiconductor manufacturing applications.

b: Expected result of activity
Line-item revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:




For Standards, identify the Standard Subtype below:
Specification

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 04/04/2023b. 1st Draft by: 07/10/2023
c. (Optional) Informational Ballot by: d. Letter Ballot by: 10/10/2023
e. TC Chapter Approval By:04/04/2024

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
NA, Japan, Europe

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will be issued – identify the recipient global technical committee(s):

Identify the recipient global technical committee(s):
Facilities
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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
Published as SEMI F20-0923

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8. TC Member Review:
is not required for this SNARF.

Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS04/04/2023
Recorded in TC Minutes04/04/2023

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on