WG/TF/SC/TC Name	Previous Leader(s)	New Leader(s)
Facilities
SEMI F51 Revision Task Force	Dalia Vernikovsky – ASNA	Dalia Vernikovsky – ASNA Keith Zhao – ASNA [New] Franics Vo – EKK Eagle America Inc. [New]
Gases
None

Document #	Document Title	TC Chapter Action	A&R Forms for Approved Ballots
Facilities
None
Gases
7410	Line-Item Revision to SEMI F77-0915, Test Method for Electrochemical Critical Pitting Temperature Testing of Stainless Steel Surfaces Used in Corrosive Gas Systems
L1	Replacement of Figures 1 and 2 which were based on pitting potential voltage tests to Figures based on CPT tests.	Failed
L2	Modification of Test Cell to conform to CPT tests.	Failed
L3	Modification of CPT test curves showing clear endpoints.	Failed

Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting

#	Type	SC/TF/WG	Details
Facilities
None
Gases
7423	SNARF	Mass Flow Controllers TF	Revision to SEMI E56-0317, Test Method for Determining Accuracy, Linearity, Repeatability, Short-Term Reproducibility, Hysteresis, and Deadband of Thermal Mass Flow Controllers – Approved by GCS on 12/17/2025
7424	SNARF	Mass Flow Controllers TF	Revision to SEMI E66-0611 (Reapproved 0517), Test Method for Determining Particle Contribution by Mass Flow Controllers – Approved by GCS on 12/17/2025

Authorized Activities
Listing of all revised or new SNARF(s) and TFOF(s) approved by the Originating TC Chapter.

#	Type	SC/TF/WG	Details
Facilities
−	TFOF	SEMI F51 Revision TF	Revised TFOF for SEMI F51 Revision Task Force.
7458	SNARF	SEMI F51 Revision TF	Revision to SEMI F51-0917, Guide for Elastometric Sealing Technology
Gases
7459	SNARF	Gases Specification TF	Revision to SEMI F113-1116, Test Method for Pressure Transducers Used in Gas Delivery Systems

#1: SNARFs and TFOFs are available for review on the SEMI Web site at: http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF

Authorized Ballots
Listing of documents authorized by the Originating TC Chapter for Letter Ballot.

#	When	TF	Details
Facilities
None
Gases
7325	Cycle 4, 2026	Filters and Purifiers TF	Revision to SEMI F28-1103 (Reapproved 0815), Test Method for Measuring Particle Generation from Process Panels
7326	Cycle 4, 2026	Filters and Purifiers TF	Revision to SEMI F43-0308 (Reapproved 0613), Test Method for Determination of Particle Contribution by Point-of-Use Gas Purifiers and Gas Filters
7459	Cycle 4, 2026	Gases Specification TF	Revision to SEMI F113-1116, Test Method for Pressure Transducers Used in Gas Delivery Systems

SNARF(s) Granted a One-Year Extension

#	TF	Title	Expiration Date
Facilities
None
Gases
6612	Materials of Construction of Gas Delivery Systems TF	New Subordinate Standard: Test Method for the Determination of Conductance of Fluid Handling Components at Subatmoshperic and Vacuum Pressure, to SEMI F32-0211, Test Method for Determination of Flow Coefficient for High Purity Shutoff Valves	Winter 2027

#1: If the Standards Document Development Project is found to be continuing, but cannot be completed within the current project
period, the TC Chapter may grant a one-year extension at a time, as many times as necessary. [Regulations § 8.3]

SNARF(s) Cancelled

#	TF	Title
Facilities
None
Gases
7153	Mass Flow Controllers TF	Line-Item Revision to SEMI E66-0611 (Reapproved 0517), Test Method for Determining Particle Contribution by Mass Flow Controllers
7327	Mass Flow Controllers TF	Line-Item Revision to SEMI E56-0317, Test Method for Determining Accuracy, Linearity, Repeatability, Short-Term Reproducibility, Hysteresis, and Deadband of Thermal Mass Flow Controllers
7410	Materials of Construction of Gas Delivery Systems TF	Line-Item Revision to SEMI F77-0915, Test Method for Electrochemical Critical Pitting Temperature Testing of Stainless Steel Surfaces Used in Corrosive Gas Systems (TF plans to reissue new SNARF for major revision)

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting

The next SEMI Standards NA Meetings are tentatively scheduled for the week of May 11-14, 2026, to be held in-person and virtual in conjunction with ASMC in Albany, New York. Schedule details TBD. https://www.semi.org/en/products-services/standards.

Facilities and Gases Task Forces meet on Monday, and the TC Chapter will meet on Tuesday

Tentative Schedule

· Monday, May 11 (Eastern)

Gases

o 09:00-10:00, Materials of Construction of Gas Delivery Systems TF

o 10:00-11:00, Filters & Purifiers TF

o 11:00-12:00, Mass Flow Controller TF

o 13:00-14:00, Gases Specification TF

o 14:00-15:00, Heater Jacket TF


Facilities

o TBD with SCIS? -- SEMI F51 Revision TF

o 13:00-14:00, Voltage Sag Immunity TF

o 15:00-16:00, Manufacturing Equipment Installation TF

· Tuesday, May 12 (Eastern)
o 9:00-12:00 Noon, Facilities & Gases NA TC Chapter