SEMI International Standards
Standards Locale: North America
Committee: Facilities & Gases
Place of Meeting: SEMI Headquarters, Milpitas, California/USA
Date of Meeting: 11/05/2024
Meeting End Date: 11/05/2024
Recording SEMI Standards Staff: Laura Nguyen
CER Posted to Web: 11/19/2024
Leadership Changes
WG/TF/SC/TC Name | Previous Leader(s) | New Leader(s) |
| Facilities |
| TC Chapter Co-chair | Steve Lewis (Gilbane Building Co) | Michael Potts (Arcadis) |
| Gases |
| None |  | |
TC Chapter Structure Changes
None.
Ballot Results
Document # | Document Title | TC Chapter Action | A&R Forms for Approved Ballots |
| Facilities |
| 6628A | New Standard: Guide for Facilities Data Package for Manufacturing Equipment Installation and Building Information Modeling | Passed, with editorial changes. |  6628A_ProceduralReview.pdf |
| Gases |
| 7202B | Line-Item Revision to SEMI F69-1213E, Test Method for Transport and Shock Testing of Gas Delivery Systems | | |
| L1 | Update throughout to comply with SEMI Regulations, Procedural Manual, and Style Manual. | Failed | |
NOTE 1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
NOTE 2: Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
# | Type | SC/TF/WG | Details |
| Facilities |
| 6288A | Ballot Authorization | Building Information Modeling (BIM) for Semiconductor Capital Equipment TF | New Standard: Guide for Facilities Data Package for Manufacturing Equipment Installation and Building Information Modeling
– Approved by GCS on 08/30/2024 |
| Gases |
| 7202B | Gases Ballot Authorization | Materials of Construction of Gas Delivery Systems TF | Line-Item Revision to SEMI F69-1213E, Test Method for Transport and Shock Testing of Gas Delivery Systems
– Approved by GCS on 08/30/2024 |
Authorized Activities
| Listing of all revised or new SNARF(s) and TFOF(s) approved by the Originating TC Chapter. |
# | Type | SC/TF/WG | Details |
| Facilities |
| None | | | |
| Gases |
| 7308 | SNARF | Heater Jacket TF | Revision to SEMI F109-0212, Guide for Heater Systems Requirements, with title change to: Guide for Material Selection for Heater Systems |
| 7309 | SNARF | Heater Jacket TF | New Standard: Test Method for Surface Heater Particle Generation |
NOTE 1: SNARFs and TFOFs are available for review on the SEMI Web site at: http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF
Authorized Ballots
None.
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
# | TF | Title |
| Facilities |
| None | | |
| Gases |
| 7197 | Filters and Purifiers TF | Line-Item Revision to SEMI F28-1103 (Reapproved 0815), Test Method for Measuring Particle Generation from Process Panels |
| 7198 | Filters and Purifiers TF | Line-Item Revision to SEMI F43-0308 (Reapproved 0613), Test Method for Determination of Particle Contribution by Point-of-Use Gas Purifiers and Gas Filters |
| 7202 | Materials of Construction of Gas Delivery Systems TF | Line-Item Revision to SEMI F69-1213E, Test Method for Transport and Shock Testing of Gas Delivery Systems |
| 7237 | Gases Specifications TF | Line-Item Revision to SEMI C70-1116, Specification for Tungsten Hexafluoride |
| 7238 | Gases Specifications TF | Line-Item Revision to SEMI F113-1116 Test Method for Pressure Transducers Used in Gas Delivery Systems |
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
The next meeting is tentatively scheduled for the week of February 24-27, in conjunction with SEMI Standards NA Winter Meetings 2025. Schedule details TBD. Please check www.semi.org/standards for updates.
Facilities and Gases Task Forces meet Monday, and the TC Chapter will meet on Tuesday
Tentative Schedule
Monday, February 24
- 9:00, Materials of Construction of Gas Delivery Systems
- 10:00, Filters & Purifiers
- 11:00, Mass Flow Controller
- 13:00, Gases Specification
- 13:00, Voltage Sag Immunity TF
- 14:00, Heater Jacket
- 15:00, BIM TF
Tuesday, February 25
- 9:00-12:00 Noon, Facilities & Gases NA TC Chapter
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