SEMI International Standards
Standards Locale: North America
Committee: EHS
Place of Meeting: Hilton Albany, Albany, New York
Date of Meeting: 05/14/2026
Meeting End Date: 05/14/2026
Recording SEMI Standards Staff: Kevin Nguyen
CER Posted to Web: 05/26/2026
Leadership Changes
WG/TF/SC/TC Name | Previous Leader | New Leader |
| EH&S NA TC Chapter |  | Eric Sklar (Safety Guru)
Lucian Girlea (Nikon Precision) |
TC Chapter Structure Changes
Previous WG/TF/SC Name | New WG/TF/SC Name or Status Change |
| S2 Airborne Chemicals TF ( New TF)
- Lauren Crane/Lam Research
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| Flow Limitting Devices TF (New TF)
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| S2 Mechanical Design TF, S7 TF, and S2/S22 TF (dormant) |
Ballot Results
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | SC/TF/WG | Details |
| 7469 | SNARF | S2 Airborne Chemicals TF | Line item Revision SEMI S2-0724E Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment |
| 7470 | SNARF | Flow Limitting Devices TF | Revision of SEMI S5-1121 - Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gases |
Authorized Ballots
# | When | TF | Details |
| R7411A | Cycle 5, 6, or 7 of 2026 | Energetic Materials EHS TF | Ratification ballot, Line-Item Revision of SEMI S30-0824, Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes |
| 7134E | Cycle 5, 6, or 7 of 2026 | Ergonomics TF | Revision to SEMI S8-0218, Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment |
| 7372 | Cycle 5, 6, or 7 of 2026 | S23 Global TF | Line-Item Revision to SEMI S23-1021E2, Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment |
| 7445A | Cycle 5, 6, or 7 of 2026 | Fire Protection TF | Line-Item Revision to SEMI S2-0724, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Revisions of Fire Protection Portion (§14) |
| 7469 | Cycle 5, 6, or 7 of 2026 | S2 Airborne Chemicals TF | Line-Item Revision SEMI S2-0724E, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment |
| 7470 | Cycle 5, 6, or 7 of 2026 | Flow Limitting Devices TF | Revision of SEMI S5-1121, Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gases |
SNARF(s) Granted a One-Year Extension
# | TF | Title | Expiration Date |
| 6830 | S3 Revision Task Force | Revision to SEMI S3-1211 (Reapproved 1017)E Safety Guideline For Process Liquid Heating Systems | July 2027 |
| 6888 | S12 (Equipment Decon) Review Task Force | Revision of SEMI S12-0211e, Environmental, Health and Safety Guideline for Manufacturing Equipment Decontamination | July 2027 |
| 6942 | Control of Hazardous Energy (CoHE) Task Force | Line-Item Revision to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Related to CoHE/LOTO section of S2) | July 2027 |
| 7133 | S6 Revision Task Force | Revision of SEMI S6-0618, Environmental, Health, and Safety Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment | August 2027 |
| 7134 | Ergonomics Task Force | Revision to SEMI S8-0218, Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment | August 2027 |
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
The next meeting is scheduled October 15, in conjunction with SEMICON West 2026 in San Francisco, California. Please check the SEMICON West website for updates: https://www.semiconwest.org/special-features/standards.
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