SEMI International Standards
Standards Locale: North America
Committee: Liquid Chemicals
Place of Meeting: OVTCCM
Date of Meeting: 10/06/2021
Meeting End Date: 10/06/2021
Recording SEMI Standards Staff: Laura Nguyen
CER Posted to Web: 10/25/2021
Leadership Changes
None.
TC Chapter Structure Changes
None.
Ballot Results
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
| 6714 | Line Item Revision to SEMI C93-0620, Guide for Determining the Quality of Ion Exchange Resin Used in Polish Applications of Ultrapure Water System |  |  6714_ProceduralReview.pdf |
| L1 | Editorial corrections. | Passed, as balloted | |
| L2 | Removed references to laser particle counter (LPC) for static leach and grab samples and added optional LPC analysis for dynamic leach test. | Passed, as balloted | |
| L3 | Updated all references to non-volatile residue monitoring (NVR/NRM) to optional. | Passed, as balloted | |
| L4 | Updated reporting of grab sample data from µg/L to µg/g dry resin. | Passed, as balloted | |
| L5 | Changed requirement of ISO Class 7 environment for test stand location to ISO Class 9. | Passed, as balloted | |
| L6 | Clarification on background requirements and background subtraction. | Passed, as balloted | |
| L7 | Added clarification that test column can be made from PFA. | Passed, as balloted | |
| L8 | Clarified procedure for PSDA sample preparation. | Passed, as balloted | |
| L9 | Removed reference of static leach with UPW. | Passed, as balloted | |
| L10 | Added particle precursors to description of N-CPC. | Passed, as balloted | |
| SEMI F40 | SEMI F40-0621, Practice For Preparing Liquid Chemical Distribution Components and Neat Polymers for Chemical Testing
(Editorial Change Type 2) | Passed, to be submitted to ISC A&R SC |  F40_ProceduralReview-EditorialChangeType2.pdf |
Note 1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
Note 2: Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
None.
Authorized Ballots
Listing of documents authorized by the Originating TC Chapter for Letter Ballot.
# | When | TF | Details |
| 6729A | Cycle 8-2021 | High Purity Polymer Material & Components TF | Line Item Revision to SEMI F57-0120, Specification for Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems |
| 6748 | Cycle 8-2021 | Chemical Mechanical Planarization Consumables (CMP-C) TF | New Standard: Guide for Reporting Performance Parameters of the Polymer Windows for Chemical Mechanical Planarization (CMP) Pads used in Semiconductor Manufacturing |
| 6828 | Cycle 8-2021 | High Purity Liquid Assemblies & Systems TF | Line Item Revision to SEMI F31-0313, Guide for Bulk Chemical Distribution Systems |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
The next meeting is tentatively scheduled for the week of December 6-9, in conjunction with SEMICON West 2021. Schedule details are below. Please check www.semiconwest.org for updates.
Monday, December 6
- 8-9:30, UPW & Water Management TFs
- 9:30-11, High Purity Polymer Material & Components TF
- 13:00-14:00, NA Liquid Chemicals Leadership Meeting
- 14:00-16:00, Chemical Analytical Methods TF
Tuesday, December 7
- 9:00-10:00, High Purity Liquid Assemblies & System TF
- 10:00-11:00, Chemical Mechanical Planarization Consumables TF
- 14:00-17:00, Liquid Chemicals NA TC Chapter Meeting
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