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SEMI International Standards
Standards Locale: Japan
Committee: Liquid Chemicals
Place of Meeting: Official Virtual TC Chapter Meeting & SEMI Japan office Room1 [Hybrid]
Date of Meeting: 01/29/2026
Meeting End Date:
Recording SEMI Standards Staff: Takeaki Hirabara
CER Posted to Web: 02/09/2026
Leadership Changes
None.

TC Chapter Structure Changes

Previous WG/TF/SC Name
New WG/TF/SC Name or Status Change
Trace Metal Analysis for High Pure IPA TFStatus: Dormant


Ballot Results

Document #
Document Title
TC Chapter Action
A&R Forms for Approved Ballots
7254Revision of SEMI F110-0712: TEST METHOD FOR MONO-DISPERSED POLYSTYRENE LATEX (PSL) CHALLENGE OF LIQUID FILTERSFailed
7255ARevision of SEMI C89 - Test Method for Particle Removal Performance of Liquid Filter Rated Below 30 nm with Inductively Coupled Plasma – Mass Spectroscopy (ICP-MS)Failed


Ratification Ballot Results
None.

Activities Approved by the GCS between meetings of TC Chapter meeting
None.

Authorized Activities
None.

Authorized Ballots

#
When
TF
Details
7267Cycle 5, 2026Liquid-Borne Particle Counter Task ForceRevision to C77-0818, Test Method for Determining the Counting Efficiency of Liquid-Borne Particle Counters for Which the Minimum Detectable Particle Size is Between 30 nm and 100 nm, with title change to: Test Method for Determining the Counting Efficiency of Liquid-Borne Particle Counters for Which the Minimum Detectable Particle Size is in the Range of 20 nm and 100 nm


SNARF(s) Granted a One-Year Extension

#
TF
Title
Expiration Date
6911Liquid Filter Task ForceNew Standard: Test Method For Metal Removal Performance Of Liquid FilterMarch 17, 2027


SNARF(s) Cancelled
None.

Standard(s) to receive Inactive Status
None.

Special Announcements of the Committee (Workshops, Programs, etc.)
None.

Next Meeting
The next meeting of the Liquid Chemicals Global Technical Committee Japan TC Chapter is scheduled for May 21, 2026, 3:30pm – 5:30pm in SEMI Japan office and OVTCCM.









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