Supplementary Materials: Various Materials

The following Documents were created by the International Standards program during development of the Standards referenced below. These files are published separately from and are a part of, but not official content of, a Standard or Safety Guideline.

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SEMI hereby grants permission to reproduce and use the following material, subject to the following reservations and conditions: These digital forms are supplied for the users' convenience. They are used with the Standard or Safety Guideline from which they were excerpted. All notices and disclaimers which pertain to the original Standards or Safety Guidelines are in effect for these forms except where otherwise noted. SEMI retains all other rights. .

Item	Committee / Applicable Standard
Example COO of Gas Delivery Systems Spreadsheet from SEMI E140-0618	Standards - Metrics / SEMI E140-0618	Download E140-0618_COOGDSMODEL_V0.XLSX 73.8K

Example COO of Gas Delivery Systems Spreadsheet from SEMI E140-1022	Standards - Metrics / SEMI E140-1022	Download E140-1022_COOGDSMODEL_V0.XLSX 77.7K

GDS-II	Standards - MEMS / NEMS / SEMI MS13-0221	Download 22MMX22MM_RETICLE.GDS 1.0K

SEMI E160-0211 Communication Template	Standards - Information & Control / SEMI E160-0211	Download E160-0211-COMMUNICATION-TEMPLATE-2010_08_26.XLS 99.5K

SEMI F121 Data Reporting Template	Standards - Liquid Chemicals / SEMI F121-0923	Download SEMI F121 DATA REPORTING TEMPLATE.DOCX 33.8K

SEMI S10 Workbook	Standards - EHS / SEMI S10-0423	Download S10WORKBOOK.XLSX 351.6K

SEMI S23 Various Materials	Standards - EHS / SEMI S23-1021E2	Download S23_EXCEL_FILES.ZIP 9,662.5K

Supplementary Material for SEMI E120.2-0823	Standards - Information & Control / SEMI E120.2-0823	Download SEMIE120-02-0823-HELPER.PROTO 32.6K

Supplementary Material for SEMI E120.2-0922	Standards - Information & Control / SEMI E120.2-0922	Download SEMIE120-02-0922-HELPER.PROTO 30.0K

Supplementary Material for SEMI E120.2-1224 (Reapproved 1225)	Standards - Information & Control / SEMI E120.2-1224 (Reapproved 1225)	Download SEMI_E120-02-1225-HELPER.PROTO 1.0K

Supplementary Material for SEMI E120.2-1224	Standards - Information & Control / SEMI E120.2-1224	Download SEMI_E120-02-1224-HELPER.PROTO 1.0K

Supplementary Material for SEMI E125.2-0923	Standards - Information & Control / SEMI E125.2-0923	Download SEMIE125-02-0923-HELPER.PROTO 57.0K

Supplementary Material for SEMI E125.2-1022	Standards - Information & Control / SEMI E125.2-1022	Download SEMIE125-02-1022-HELPER.PROTO 1.0K

Supplementary Material for SEMI E125.2-1224 (Reapproved 1225)	Standards - Information & Control / SEMI E125.2-1224 (Reapproved 1225)	Download SEMI_E125-02-1225-HELPER.PROTO 1.0K

Supplementary Material for SEMI E125.2-1224	Standards - Information & Control / SEMI E125.2-1224	Download SEMI_E125-02-1224-HELPER.PROTO 1.0K

Supplementary Material for SEMI E132.2-0422	Standards - Information & Control / SEMI E132.2-0422	Download SEMIE132-02-0422-HELPER.PROTO 60.9K

Supplementary Material for SEMI E132.2-0624	Standards - Information & Control / SEMI E132.2-0624	Download SEMIE132-02-0624-HELPER.PROTO 1.0K

Supplementary Material for SEMI E132.2-0923	Standards - Information & Control / SEMI E132.2-0923	Download SEMIE132-02-0923-HELPER.PROTO 1.0K

Supplementary Material for SEMI E132.2-0924	Standards - Information & Control / SEMI E132.2-0923	Download SEMIE132-02-0924-HELPER.PROTO 1.0K

Supplementary Material for SEMI E132.2-1224	Standards - Information & Control / SEMI E132.2-1224	Download SEMI_E132-02-1224-HELPER.PROTO 61.1K

Supplementary Material for SEMI E132.2-1225	Standards - Information & Control / SEMI E132.2-1225	Download SEMI_E132-02-1225-HELPER.PROTO 60.7K

Supplementary Material for SEMI E134.2-0624	Standards - Information & Control / SEMI E134.2-0624	Download SEMIE134-02-0624-HELPER.PROTO 1.0K

Supplementary Material for SEMI E134.2-0923	Standards - Information & Control / SEMI E134.2-0923	Download SEMIE134-02-0923-HELPER.PROTO 1.0K

Supplementary Material for SEMI E134.2-0924	Standards - Information & Control / SEMI E134.2-0924	Download SEMIE134-02-0924-HELPER.PROTO 83.8K

Supplementary Material for SEMI E134.2-1022	Standards - Information & Control / SEMI E134.2-1022	Download SEMIE134-02-1022-HELPER.PROTO 83.2K

Supplementary Material for SEMI E134.2-1224 (Reapproved 1225)	Standards - Information & Control / SEMI E134.2-1224 (Reapproved 1225)	Download SEMI_E134-02-1225-HELPER.PROTO 1.0K

Supplementary Material for SEMI E134.2-1224	Standards - Information & Control / SEMI E134.2-1224	Download SEMI_E134-02-1224-HELPER.PROTO 1.0K

Supplementary Material for SEMI E179-0320	Standards - Information & Control / SEMI E179-0320	Download SEMIE179-0320-HELPER.PROTO 27.9K

Supplementary Material for SEMI E179-0623	Standards - Information & Control / SEMI E179-0623	Download SEMIE179-0623-HELPER.PROTO 1.0K

Supplementary Material for SEMI E179-0624	Standards - Information & Control / SEMI E179-0624	Download SEMIE179-0624-HELPER.PROTO 1.0K

Supplementary Material for SEMI E179-0822	Standards - Information & Control / SEMI E179-0822	Download SEMIE179-0822-HELPER.PROTO 28.0K

Supplementary Material for SEMI E179-0924	Standards - Information & Control / SEMI E179-0924	Download SEMIE179-0924-HELPER.PROTO 1.0K

Supplementary Material for SEMI E179-1224	Standards - Information & Control / SEMI E179-1224	Download SEMI_E179-1224-HELPER.PROTO 1.0K

Supplementary Material for SEMI E179-1225	Standards - Information & Control / SEMI E179-1225	Download SEMI_E179-1225-HELPER.PROTO 1.0K

Various Material for SEMI E164-0414	Standards - Information & Control / SEMI E164-0414	Download E164-00-1113-VM.ZIP 124.2K

Various Material for SEMI E172-0118	Standards - Information & Control / SEMI E172-0118	Download E172-00-0118-VM.ZIP 36.7K

Various Material for SEMI E172-0225	Standards - Information & Control / SEMI E172-0225	Download SEDD_TRACKSYS_MODEL404_0225.XML 378.5K

Various Material for SEMI E172-1023	Standards - Information & Control / SEMI E172-1023	Download E172-00-1023-VM.ZIP 1.0K

VOID MASK	Standards - 3D Packaging and Integration / SEMI 3D17-1217	Download VOIDMASK010311-4X.GDS 350.0K

	Standards - Automated Test Equipment /	Download 1.0K

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Supplementary Materials: Various Materials

Item

Committee / Applicable Standard