SNARF for Doc 7525

SEMI International Standards
Standards New Activity Report Form (SNARF)

Date Prepared: 07/02/2026

Revised (if Applicable):

Document Number: 7525
SNARF for: Line-Item Revision to
SEMI E120-1225 Specification for the Common Equipment Model (CEM),
SEMI E120.2-1225 Specification for Protocol Buffers for Common Equipment Model (CEM),
SEMI E125-1225 Specification for Equipment Self Description (EqSD),
SEMI E125.2-1225 Specification for Protocol Buffers for Equipment Self Description (EqSD),
SEMI E132-1225 Specification for Equipment Client Authentication and Authorization,
SEMI E132.2-1225 Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA),
SEMI E134-1225 Specification for Data Collection Management,
SEMI E134.2-1225 Specification for Protocol Buffers of Data Collection Management, and
SEMI E179-1225 Specification for Protocol Buffers Common Components

Originating Global Technical Committee: Information & Control

Originating TC Chapter: North America

Task Force (TF) in which work is to be carried out: Diagnostic Data Acquisition Task Force NA

Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
Implementation experience with the EDA Freeze 3 standards has identified several ambiguities and inconsistencies in the SEMI E125, SEMI E134, and SEMI E179 specifications that can lead to inconsistent metadata definitions, interoperability challenges, and differing interpretations by implementers.

Additional implementation feedback has identified a need to clarify the distinction between transient and nontransient parameters in SEMI E134 Data Collection Plan Management, including parameter request behavior and associated validation rules. Clarifying these requirements will improve consistency across implementations and reduce ambiguity in error handling and data collection behavior.

The proposed revisions also address several areas where additional clarification would improve interoperability, a clarification of ad hoc data collection usage with nontransient parameters, restrictions on ParameterReference usage, and naming recommendations for ParameterReference objects that refer to the same parameter.

Implementation experience has also identified potential confusion in SEMI E179 regarding representation of binary data. The current base64Binary type name originated from earlier SOAP/XML-based EDA standards, where binary content was represented as Base64-encoded text. In EDA Freeze 3, gRPC can transport binary data directly as byte arrays, making the historical name potentially misleading. Some implementers may incorrectly interpret the data as Base64-encoded UTF-8 text rather than raw binary data. Clarifying or updating the type naming would improve consistency with the underlying protocol representation and reduce implementation errors.

Note 1 – This SNARF lists all the EDA Core Standards in the Line Item Revision (SEMI E120, E120.2
E125, E125.2, E132, E132.2, E134, E134.2, E179). This is done so that if technical changes are required to related SEMI standards, a new SNARF does not need to be created before ballot submission deadline. The ballot submitted for voting will clearly state which Standards are proposed to be updated as part of the Line Item Revision ballot.

b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information: Anyone implementing EDA servers or clients

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
This Line Item Revision will investigate and, as appropriate, revise SEMI E125, SEMI E134, and SEMI E179 to:

Review SEMI E134 Data Collection Plan Management and determine whether clarification is needed regarding transient and nontransient parameter requests.

Clarify SEMI E134 ParameterRequests requirements, including sourceId usage and validation behavior for transient and nontransient parameters.

Clarify SEMI E134 InvalidParameterRequest error conditions.

Clarify in SEMI E125 that ad hoc data collection refers to E134 GetParameterValues() and not GetObjTypeInstanceIds() or GetObjTypeAttributes() with respect to nontransient parameters.

Update SEMI E125 Figure 8 to explicitly indicate that ParameterReferences apply only to nontransient parameters.

Add guidance regarding consistent parameterName usage when multiple ParameterReference objects reference the same parameter.

Review the representation of binary data in SEMI E179 and determine whether updates are needed to improve clarity and consistency between the SimpleTypeSpecifier enumeration and the binary data representation used by gRPC, including possible renaming of the base64Binary type and associated updates throughout the standard and supporting protocol definitions.

Any other changes to address features or defects, or issues with the Style Guide raised by Task Force members during the development and review of the proposed changes related to these line item topics. Significant changes in scope still require a SNARF revision in compliance with SEMI Regulations.

b: Expected result of activity
Line-item revision to two or more existing Standards or Safety Guidelines

For a new Subordinate Standard, identify the Primary Standard here:

Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials, Addition of one or more Appendices or Complementary Files to an existing Standard or Safety Guideline, Addition of one or more Related Information sections or Various Materials to an existing Standard or Safety Guideline, Revision or addition of one or more Subordinate Standards to an existing Primary Standard

For Standards, identify the Standard Subtype below:
Specification

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones

a. Activity Start: 10/01/2026	b. 1st Draft by: 12/01/2026
c. (Optional) Informational Ballot by:	d. Letter Ballot by: 02/01/2027
e. TC Chapter Approval By:10/01/2027

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):

c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:

NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:

b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is previously known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:

the incorporation of Copyrighted Item will NOT be required

NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
SEMI E120, E120.2, E132, E132.2, E125, E125.2, E134, E134.2 and E179 included patent material and is covered by NON-ASSERTION AGREEMENT (LOA) between SEMI and Asyst Technologies has been signed with for US Patents #11/340101, #11/107508, #09/899833, and 09/496009, in 2007. This agreement is maintained by PEER Group, who has acquired the patents and patent applications previously owned by Asyst Technologies

No intent to add new patent material as part of this Line Item Revision.

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8. TC Member Review:
is not required for this SNARF.

Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:

TC Chapter or GCS	10/14/2026
Recorded in TC Minutes

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10. SNARF Extension Dates:

TC Chapter Extension Granted on

Extension Expires on