SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 12/09/2024Revised (if Applicable):

Document Number: 7332
SNARF for: New Standard: Specification for Large JEDEC ™ Tray Stack Loadport


Originating Global Technical Committee: Physical Interfaces & Carriers
Originating TC Chapter: Japan
Task Force (TF) in which work is to be carried out: Next Gen Assembly / Test Material Handling Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
AMHS transport of products in semiconductor assembly / test (AT) manufacturing is very limited – tool to tool transportation remains very manual. In several scenarios, existing standards have been adapted for use in AT, but without development of updated standards.
One strategy for next gen assembly test manufacturing is to transition from a traditional serially arranged set of equipment to process cells that can be randomly accessed by a central “mainframe” robot. This activity will develop a new standard loadport interface for a stack of large JEDEC trays, where the loadport is intended to be used within the equipment mainframe. The mainframe robot will move the tray stack from an EFEM to a process cell, and another, etc until processing is complete. Because each process cell (or EFEM) may be manufactured by a different supplier, a standard interface between the mainframe robot and process cell (or EFEM) is required.


b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information: assembly / test manufacturing

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
The new standard will develop a loadport for handoff of stacks of “large” JEDEC trays and include:
- (The JEDEC tray will be standardized by JEDEC, not in SEMI scope)
- JEDEC tray orientation
- tray stack sizing
- load port datum planes and the relative position of the datum planes
- required clearances above and below the tray stack
- critical dimensions and tolerances of the “shelf” that the tray stack will be picked up from or placed to
- loadport alignment target to enable easy robot teaching and alignment
- other loadport critical dimensions as aligned by the NGAT TF

b: Expected result of activity
New Standard or Safety Guideline (including replacement of an existing Standard or Safety Guideline)

For a new Subordinate Standard, identify the Primary Standard here:




For Standards, identify the Standard Subtype below:
Specification

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 12/24/2025b. 1st Draft by: 02/01/2025
c. (Optional) Informational Ballot by: d. Letter Ballot by: 02/01/2025
e. TC Chapter Approval By:02/01/2025

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)


b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):


c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
The trays that will be transferred using the is load port standard are not specified by a SEMI standard, but rather a JEDEC standard. This may drive added complexity and require additional coordination across different standards organizations that is not normally required.
Note: The SEMI Standards Regulations currently do not address patents that are in the application phase where information about the filing is not yet publicly available.
As a voluntary disclosure, Intel has filed with SEMI a Letter of Intent for Material Patent Claims (the LOI) with respect to a recently filed and in-progress patent application. If a patent ultimately issues from such patent application, and if it contains Material Patent Claims, Intel has committed in the LOI to make licenses available “without compensation to an unrestricted number of applicants on a worldwide basis with reasonable terms and conditions that are demonstrably free of unfair discrimination”.
SEMI Standards should be written in such a way that the use of patented technology is not necessary. However, when technical reasons require the use of a patented technology as the only means to apply a Published Document the procedure described in section 16 of the SEMI Standards Regulations shall be followed.

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8. TC Member Review:
took place between (put dates below) before approval by the GCS, or

Member Review Start Date; 12/27/2024
Member Review End Date: 1/10/2025

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS02/10/2025
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on