SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 09/19/2025Revised (if Applicable):

Document Number: 7456
SNARF for: Revision to Add a New Subordinate Standard: Specification for Common Data for Deposition Components to Specification for Equipment Data Publication

Originating Global Technical Committee: Information & Control
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Equipment Data Publication (EDP) Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
There is a wide selection of data that can be collected from equipment and subcomponents through existing SEMI Standards interfaces (e.g., SECS/GEM, EDA/Interface A, Sensor Bus, etc.), industry standards interfaces (e.g., OPC, MQTT, etc.) and custom interfaces.

Currently, there is little consistency on what information the equipment or component provides, so each equipment user needs to spend time and effort to understand what data can be accessed from a particular component before it is collected, and determine if that data be sufficient for their needs (e.g., what does that data represent, what format is it reported, what is the data frequency of that content, etc.).

Defining a minimal set of data that can be acquired from the equipment and its components would significantly support data collection and offline analysis efforts (e.g., analysis such as early excursion detection and prevention). This would speed up the integration process and set expectations for both the equipment user and the equipment supplier regarding what content data is available.

This new subordinate standard to SEMI E190-1124 Equipment Data Publication (EDP) will specify an implementation mapping of the E190 category levels to Level 1, 2, and 3 categories for deposition components in a pattern similar to what has been proposed in SEMI E190.1 for etch components.

As with E190.1, this standard should not add new concepts to the SEMI E190 model. The only anticipated change to SEMI E190 is a reference to this new subordinate standard in section 11.1 (Subordinate Stanards).

The EDP TF will form a deposition work group from its current membership and other domain experts to provide the necessary deposition process/equipment expertise.


b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information: Device Manufacturers & Original Equipment Manufacturers (OEMs); in particular, anyone looking to provide data from deposition components through software interfaces

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
This proposal makes the case for creating a new Subordinate Standard to define specific content that a deposition component reports, using the infrastructure defined in the Primary Standard (i.e., Tables and columns defined in the Primary Standard outlining attributes are populated with data content specific to deposition components).

- Define what deposition content data should be defined as the required minimal set of data, and how will that deposition content data be organized.

- As part of this investigation, the Task Force will determine if content can be specified at a higher category level (by defining descriptive categories with detailed examples), rather than specifying content at a parametric level.

- Investigate if additional attributes/configuration specific to accessing the content data through SEMI Standard interfaces should be defined for this component (e.g., if the content is accessed through EDA / Interface A, how should the content data be represented in SEMI E120 / E125). If such requirements are defined in the Subordinate standard, they will be optional requirements.

The EDP Task Force and its deposition work group will work with deposition equipment and process engineers and other relevant domain experts to identify the components, mechanisms, variables, events, alarms, and other deposition-related information that fall into the Level 1, Level 2, and Level 3 categories as defined by SEMI E190.

The task force will determine whether or not this can be handled in a single subordinate standard or will multiple standards be required because of large process technology differences.

b: Expected result of activity
New Subordinate Standard to an existing Standard or to a new Primary Standard to be developed concurrently with this new Subordinate Standard

For a new Subordinate Standard, identify the Primary Standard here:
SEMI E190 – SPECIFICATION FOR EQUIPMENT DATA PUBLICATION (EDP)

Revision or addition of one or more Subordinate Standards to an existing Primary Standard

For Standards, identify the Standard Subtype below:
Specification

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 10/01/2025b. 1st Draft by: 12/01/2025
c. (Optional) Informational Ballot by: d. Letter Ballot by: 02/01/2026
e. TC Chapter Approval By:05/01/2026

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)


b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
None.

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8. TC Member Review:
took place between (put dates below) before approval by the GCS, or

Member Review Start Date; 2/5/2026
Member Review End Date: 2/18/2026

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS03/10/2026
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on