SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 03/25/2024Revised (if Applicable):

Document Number: 7236
SNARF for: Line Item Revision to SEMI E90-0921 - Specification for Substrate Tracking and SEMI E90.1-0312 (Reapproved 0921) - Specification for SECS-II Protocol Substrate Tracking

Originating Global Technical Committee: Information & Control
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Advanced Backend Factory Integration
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
Currently, SEMI E90 supports only one substrate ID reader instance. Some Equipment can have multiple substrate ID readers due to different substrates. SEMI E90 defines an Equipment Constant to represent the availability of the substrate ID reader. If multiple substrate ID readers exist in the Equipment, their availability cannot be represented independently.

Some equipment, like a bonder, can have a substrate ID reader for the target material and multiple substrate ID readers for each source material type (e.g. tray, film frame, T&R, …).

Although, there may be multiple readers in the Equipment the substrate will only be identified by one Reader. Which substrate reader will be used for the identification depends on the Equipment configuration and logic.

SEMI E90.1 needs to be synchronized with changes in the primary standard (SEMI E90).


b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information: Anyone who implements SEMI E90 and has multiple ID readers

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
As part of the work on this Line-Item Revision, the task force will investigate:

- Providing a way to support multiple substrate ID readers in an Equipment. This should be an optional requirement. Equipment with a single substrate ID reader should be unaffected.
- Consider defining additional SubstrateReaderEnabled Equipment Constants and corresponding collection events per reader for multi-reader systems.
- Consider a way to identify each substrate ID reader to distinguish its functionality.

The ballot can include any other changes to address features or defects, or issues with the Style Guide raised by Task Force members during the development and review of the proposed changes related to these line-item topics. Significant changes in scope will require a new SNARF in compliance with SEMI Regulations.

b: Expected result of activity
Line-item revision to two or more existing Standards or Safety Guidelines

For a new Subordinate Standard, identify the Primary Standard here:


Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials, Addition of one or more Appendices or Complementary Files to an existing Standard or Safety Guideline, Addition of one or more Related Information sections or Various Materials to an existing Standard or Safety Guideline, Revision or addition of one or more Subordinate Standards to an existing Primary Standard

For Standards, identify the Standard Subtype below:
Specification

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 04/01/2024b. 1st Draft by: 08/01/2024
c. (Optional) Informational Ballot by: d. Letter Ballot by: 09/01/2024
e. TC Chapter Approval By:11/01/2024

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
Information & Control – ABFI Task Force, GEM300 TF

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
None.

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8. TC Member Review:
is not required for this SNARF.

Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS03/27/2024
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on