SEMI International Standards TASK FORCE ORGANIZATION FORM (TFOF)

Date Prepared: 07/25/2024

Revised (if Applicable):

Name of Task Force (TF): Parts and Materials ID Task Force

Global Technical Committee: Traceability

Originating Technical Committee Region: Japan

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1. Charter: (State the objective of the proposed TF.)
Defects introduced by process-critical equipment and its component or materials affect final product quality resulting in lower yields and higher manufacturing costs. They can also negatively impact productivity of equipment (e.g., OEE).
This Task Force will consider means to provide traceability for critical elements of process-critical equipment and material such as;
• seals, mass flow controllers, valves, etc.;
• sub-systems that support process tools e.g. vacuum, abatement, chillers used in semiconductor or related industries• process chemical (e.g., photoresist) and its dispensing bottle
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2. Scope: (Define the specific activities that the TF will conduct.)
The Task Force will develop and maintain Standards relating to and directly concerning traceability and verification of components/parts of equipment and materialsThis includes, but is not limited to:• Identification (for example via barcodes, Data Matrix);• System for transferring information (for example, part information, Certificates of Authenticity, Certificates of Compliance, Certificates of Use, etc.);• Part traceability protocols.Although work will be primarily considering the semiconductor equipment and materials, it can be applied to other related industries.
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3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
Single Device Traceability Task Force, Equipment and Materials Traceability Task Force
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4. Formation Date:(TF formed on)

Task Force formed on: 07/25/2024
Task Force approved by Committee/GCS on:

5. Comments
None.