SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 12/18/2025Revised (if Applicable):

Document Number: 7443
SNARF for: New Preliminary Subordinate Standard: TCP/IP Communication for Enhanced Handoff Interface to Specification for Enhanced Handoff Interface

Originating Global Technical Committee: Physical Interfaces & Carriers
Originating TC Chapter: Japan
Task Force (TF) in which work is to be carried out: Next Gen Assembly / Test Material Handling Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
AMHS transport of products in semiconductor assembly / test (AT) manufacturing is very limited – tool to tool transportation remains very manual. In several scenarios, existing standards have been adapted for use in AT, but without development of updated standards.

SEMI E84 - Specification for Enhanced Carrier Handoff Parallel I/O Interface, is a widely adopted and well-established Standard. However, the standard uses physical input/output signals for carrier handoff. There is an opportunity in some applications to use alternate communication paths for the handoff signals, specifically TCP/IP.

The TF recommends that the Enhanced Handoff Interface be split into a primary and subordinate standards. The primary will cover the general handoff interface requirements, while the subordinate will cover how signals are transmitted over TCP/IP. We have separated the “how signals are transmitted” portion to allow for additional alternate “how” methods to be added at a future date (for example, via Bluetooth, other wireless transmission protocols, or other TCP/IP based protocols, etc). A subordinate structure allows these alternate transmission protocols to be implemented without modifying the primary standard governing the general interface requirements, and allows multiple transmission methods to exist at the same time.
The TF believes that this primary and subordinate structure is the best way to implement the new enhanced carrier handoff standard, and enable to the TF to implement the new standard (and also future transmission protocols) in the lowest amount of time.


b. Estimate effect on industry.
3: Major effect on a few companies - identify the relevant companies
Sector or Company Information: AMHS and LP suppliers

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
The Task Force recommends creating a new preliminary standard for the baseline handoff signals, with a preliminary subordinate standard covering TCP/IP interface. A new standard will avoid conflicts with or confusion surrounding existing E84 implementations, while a subordinate standard structure for TCP/IP easily enables the addition of future subordinate standards to specify other alternate communication protocols. The existing PI/O / wire-based communication protocols will remain in E84 and not duplicated or specified in this new standard.

The Task Force will investigate and create a new specification to describe material (i.e., carrier, wafer, reticle, trays, etc.) handoff between active equipment the passive equipment. The handoff signals and logic will use E84 as a starting point, but may also include adjustments as needed based on planned communication protocols (i.e., TCP/IP) or lessons learned since E84 was implemented in ~2000.

Active and passive equipment will be broadly defined, allowing the end user to define applications / equipment where the handoff would be implemented. These may include:

This SNARF covers the preliminary subordinate standard; this scope includes:
1. Implementation details to apply the primary standard requirements using TCP/IP communication.
2. How TCP/IP connections are set up between active and passive equipment. Who manages / how are the IP addresses managed, etc.
3. Physical connection setup (direct active to passive, via a network hub, etc.)
4. Signal messaging protocols and formats, e.g., how do you send/receive over TCP/IP signals that are defined in item 1.
5. TCP/IP specific guidance to implement requirements and recommendations for error handling and error recovery.
Other configuration and setup options as agreed by the TF.

b: Expected result of activity
New Preliminary Standard

For a new Subordinate Standard, identify the Primary Standard here:
TBD, developed concurrently



For Standards, identify the Standard Subtype below:
Specification

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 06/01/2025b. 1st Draft by: 03/01/2026
c. (Optional) Informational Ballot by: d. Letter Ballot by: 04/01/2026
e. TC Chapter Approval By:02/01/2026

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)


b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will be issued – identify the recipient global technical committee(s):

Identify the recipient global technical committee(s):
Information & Control
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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):


c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
None.

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8. TC Member Review:
took place between (put dates below ) before approval at the TC Chapter Meeting, or

Member Review Start Date; 10/31/2025
Member Review End Date: 11/14/2025

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS12/18/2025
Recorded in TC Minutes02/02/2026

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on