SEMI International Standards TASK FORCE ORGANIZATION FORM (TFOF)

Date Prepared: 06/20/2024

Revised (if Applicable):

Name of Task Force (TF): “6 x12 inch” Reticle Carrier and Load Port Task Force

Global Technical Committee: Physical Interfaces & Carriers

Originating Technical Committee Region: North America

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1. Charter: (State the objective of the proposed TF.)
Develop standards for 6x12 inch RSP, 6x12 inch EUVL Pod, and 6x12 inch Tool Load Port.
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2. Scope: (Define the specific activities that the TF will conduct.)
The Task Force will create three standards for carriers and load ports for the 6x12 inch Pods.
· 6x12 inch RSP Style carrier standard
· 6x12 inch EUVL POD (including an inner pod) standard
· 6x12 inch Tool Load Port standard that can interface with the 6x12 inch RSP and 6x12 inch EUVL pod

The shipping box for blanks is not currently planned to be part of the Task Force but can be discussed in more detail as part of the meetings.

The goal will be to copy, reuse, or reference existing carrier and load port standards as much as possible or where feasible. For example, previous standards did not include a pellicle frame.
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3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
Global Technical Committee: Micropatterning, TF: NA Microlithography Committee.
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4. Formation Date:(TF formed on)

Task Force formed on: 07/10/2024
Task Force approved by Committee/GCS on: 07/10/2024

5. Comments
None.