SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 03/25/2024Revised (if Applicable):

Document Number: 7308
SNARF for: Revision to SEMI F109-0212, Guide for Heater Systems Requirements, with title change to: Guide for Material Selection for Heater Systems

Originating Global Technical Committee: Gases
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Heater Jacket Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
1. The continuing demand for higher performing heater systems in the semiconductor-manufacturing sector is requiring standardization due to numerous issues impacting the customer/user base and the manufacturers of heater systems for the semiconductor equipment industry.

2. Heater Materials Guideline to be used to determine the safe material construction in type ranges of temperature requirements. Primary standard to be based upon four levels of use: low (0°C – 100°C), medium (100°C – 200°C) high (200°C – 300°C) and ultrahigh (300°C and above)

3.Power density guideline for materials use would be natural attribute of this guideline purpose: (Low 0 – 2 watt/cm2) (medium 2 – 20 watt/cm2) (high 20 – 200 watts/cm2) (ultrahigh above 200 watt/cm2)
Cleanroom standards to materials guidelines, and safety standards for human health.

4. This revised Guide provides supplemental information on the material appropriate to the heating system. While the original F109 discusses considerable requirements in engineering this is now complemented with the guideline of material science directed at the appropriate heater technology and associated materials for use in a heater system.

5. This revised Guide now includes guidance from engineering to materials science considerations in the design of semiconductor surface heater systems.



b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information: heater manufacturers

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
1. Create a table of materials at each level of 3 tier system of use, as in low, medium, and high, risk range.

2. Risk, herein, includes: temperature phase change, wattage density, and particle contamination.

3. Safety issues related to use temperature range.

This Guide will provide a uniform list of recommendations for heater materials to establish specifications for product design, development, test, and manufacturing.

b: Expected result of activity
Major revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:


Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials

For Standards, identify the Standard Subtype below:
Guide

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 11/05/2024b. 1st Draft by: 01/06/2025
c. (Optional) Informational Ballot by: d. Letter Ballot by: 06/01/2025
e. TC Chapter Approval By:10/01/2025

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
n/a

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):
n/a

c. Intercommittee Ballots:
will be issued – identify the recipient global technical committee(s):

Identify the recipient global technical committee(s):
EH&S, Facilities
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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
Previous SNARF 6916, Replacement of SEMI F109, Guide for Heater Systems Requirements, as a New Standard: Guide for Material Selection for Heater Systems, was cancelled to change “replacement ballot” to “revision” with title change.

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8. TC Member Review:
took place between (put dates below ) before approval at the TC Chapter Meeting, or

Member Review Start Date; 10/23/2024
Member Review End Date: 11/05/2024

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS11/05/2024
Recorded in TC Minutes11/05/2024

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on