SEMI International Standards
TASK FORCE ORGANIZATION FORM (TFOF)
Date Prepared:
12/19/2025
Revised (if Applicable):
Name of Task Force (TF):
Maintenance Robot Communication (MRC) Task Force
Global Technical Committee:
Information & Control
Originating Technical Committee Region:
Japan
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1. Charter:
(State the objective of the proposed TF.)
The purpose of this task force is to develop standards that define communication protocols and data exchange specifications between maintenance robots and equipment, as well as between these and the integrated factory systems.
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2. Scope:
(Define the specific activities that the TF will conduct.)
To develop new SEMI Standard for communication protocols and data exchange specifications to support various applications of maintenance robots and maintain stable communication.
This includes protocol design related to wired and wireless communication technologies, security features, and operational management.
The communication targets include, but are not limited to:
- Between equipment and the Fab System,
- Between equipment and robots,
- Between robots and the Fab System,
- Between robots and peripheral devices (e.g., parts stockers).
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3. Formal linkages with TFs in other Regions/Locales:
(Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
Information and Control Committees - North America, Taiwan, Korea and China
North America GEM 300 TF, Korea GEM 300 TF and China GEM 300 TF
Physical Interface and Carriers (PIC) Committees – North America and Japan
Mobile Maintenance Robot Safety TF under Japan EH&S Committee
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4. Formation Date:
(TF formed on)
Task Force formed on:
12/19/2025
Task Force approved by Committee/GCS on:
12/19/2025
5. Comments
None.
