SEMI International Standards TASK FORCE ORGANIZATION FORM (TFOF)

Date Prepared: 03/28/2026

Revised (if Applicable):

Name of Task Force (TF): Flow Limitting Devices Task Force

Global Technical Committee: EH&S

Originating Technical Committee Region: North America

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1. Charter: (State the objective of the proposed TF.)
Prepare ballot(s), as necessary, for revision of SEMI S05, Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gases. Prepare the responses to those ballot(s) for adjudication by the NA EHS TCC.
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2. Scope: (Define the specific activities that the TF will conduct.)
Concerns included in the responses to the SEMI S05 Reapproval ballot.2) Other matters related to SEMI S05 that are identified during the TF’s work.
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3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)

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4. Formation Date:(TF formed on)

Task Force formed on: 05/14/2026
Task Force approved by Committee/GCS on: 05/14/2026

5. Comments
None.