SEMI International Standards
TASK FORCE ORGANIZATION FORM (TFOF)
Date Prepared:
12/03/2025
Revised (if Applicable):
Name of Task Force (TF):
Mobile Maintenance Robot Safety Task Force
Global Technical Committee:
EH&S
Originating Technical Committee Region:
Japan
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1. Charter:
(State the objective of the proposed TF.)
- Evaluation of existing robot standards (e.g., ISO10218-2) and SEMI Safety Guidelines to identify gaps to realize safe operation of mobile maintenance robots in the semiconductor Fab environment.
- To propose and conduct development of Safety Guideline(s) to address above mentioned gaps.
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2. Scope:
(Define the specific activities that the TF will conduct.)
This task force is to develop new safety guidelines that are deemed necessary to fill the gaps between existing industry standards including SEMI Safety Guidelines with regard to safe operation of mobile maintenance robots. The activities include the following topical areas.
(1) Safety criteria for the maintenance robots that operate in collaboration with maintenance personnel or in the close vicinity or overwrapping spaces where any routine task is undertaken by personnel
(2) Safety criteria for the maintenance robots and production equipment interfaces and other interactive features provided to facilitate robotic maintenance.
(3) Safety criteria for mobile maintenance robots to eliminate or reduce risks that are anticipated from its transportation within CR floor spaces and interaction with systems other than the production equipment to which the robot is designed to perform maintenance, and enable safe operation of such robots in semiconductor fabs.
(4) Necessary conditions for operation environment (e.g., clean-room floor conditions, minimum width of isles)
NOTE: (4) may result in requests/recommendations to other GTCs.
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3. Formal linkages with TFs in other Regions/Locales:
(Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
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4. Formation Date:
(TF formed on)
Task Force formed on:
12/03/2025
Task Force approved by Committee/GCS on:
12/03/2025
5. Comments
None.
