SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 05/13/2026Revised (if Applicable):

Document Number: 7478
SNARF for: Revision to SEMI E95-1101: Specification for Human Interface for Semiconductor Manufacturing Equipment and Revision to Add a New Subordinate Standard: Specification on Communicating Safety Information in Human Interfaces to SEMI E095-1011: Specification for Human Interface for Semiconductor Manufacturing Equipment

Originating Global Technical Committee: Information & Control
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Graphical User Interfaces (GUI) Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
Equipment manufacturers should be able to reference a standard which specifies how to apply modern technologies to the equipment’s graphical user interface.

It is expected that proposed modifications to the standard will (a) significantly aid designers in developing an easier to use GUI, (b) be a powerful and beneficial means of implementing consistent graphical user interfaces across many equipment types, and (c) can be reasonably forecast to improve throughput and ROI.

Note: This SNARF title refers to the current publication date, 1101. The revised standard is in the publication process, so we do not have a new date code.

This is a Revision SNARF because of expected change to the Scope section, to address passive voice issues.


b. Estimate effect on industry.
1: Major effect on entire industry or on multiple important industry sectors - identify the relevant sectors
Sector or Company Information: Major effect on anyone implementing equipment control software in Semiconductor Front-End and Back-End

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
Investigate the use of terms that appear to be inconsistent with definitions in SEMI Safety Guidelines S1 and S2, and revise the specification to harmonize terms with those in the Guidelines.

Investigate the SEMI Safety Guidelines (for example, SEMI S1 and S2) for guidance related to the user interface, and if anything needs to be aligned in E95.

Address issues with document text, in part identified by Publications, to comply with the Style Manual (e.g. correct for use of passive voice).

Address comments submitted by voters in Cycle 7-2025 for document 6743C. Comments have been discussed by the Task Force. Task Force leaders will develop edits towards a future ballot.

Consider development of a subordinate standard to express examples of graphics such as icons.

The scope can include any other changes to address features or defects; or issues with Style Guide, raised by Task Force members during the development and review of the proposed changes. Significant changes in scope will require a new SNARF in compliance with SEMI Regulations.

b: Expected result of activity
Major revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:
E95

Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials, Addition of one or more Appendices or Complementary Files to an existing Standard or Safety Guideline, Addition of one or more Related Information sections or Various Materials to an existing Standard or Safety Guideline, Revision or addition of one or more Subordinate Standards to an existing Primary Standard

For Standards, identify the Standard Subtype below:
Specification

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 07/24/2026b. 1st Draft by: 07/01/2026
c. (Optional) Informational Ballot by: d. Letter Ballot by: 08/01/2026
e. TC Chapter Approval By:10/01/2026

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
North America EH&S TC Chapter

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):
None

c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
None.

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8. TC Member Review:
is not required for this SNARF.

Member Review Start Date; 6/2/2026
Member Review End Date: 6/16/2026

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS07/24/2026
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on