SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 11/04/2025Revised (if Applicable):

Document Number: 7411
SNARF for: Line Item Revision of SEMI S30-0824 Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes

Originating Global Technical Committee: EH&S
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Energetic Materials EHS Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
Paragraph 15.1.2 calls for energetic materials enclosures to have “self-latching, self-closing doors”. That paragraph includes an EXCEPTION for enclosures with
· not more than 2 L of energetic material,
· energetic material delivery from the enclosure at subatmospheric pressure, and
· (if the container is refilled in the enclosure) an interlock to prevent refill flow and reduce the pressure in the delivery line to the container to no more than ambient pressure, if a fire, leak, or open door is detected.
At least one SME manufacturer has found it difficult to comply with one of the provisions of ¶15,1.3 (door hold-open mechanisms), releasing the enclosure door hold mechanism if there is a 30 second period in which there is no person at the enclosure.
There is also some concern that it would be better to have a default approach that mitigated the risk of release rather than that responded protectively to a release.
That SME manufacturer has proposed adding an EXCEPTION to 15.1.2 and plans to propose other modifications to §15.
This SNARF authorizes the TF to develop a ballot proposing a Line Item Revision of SEMI S30 to address this concern.


b. Estimate effect on industry.
4: Slight effect or effect not determinable
Sector or Company Information:

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
Revision of the criteria regarding source enclosure doors.

b: Expected result of activity
Line-item revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:


Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials

For Standards, identify the Standard Subtype below:


Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 10/01/2025b. 1st Draft by: 11/01/2025
c. (Optional) Informational Ballot by: d. Letter Ballot by: 12/01/2025
e. TC Chapter Approval By:02/01/2026

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)


b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will be issued – identify the recipient global technical committee(s):

Identify the recipient global technical committee(s):
Gases, Liquid Chemicals
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5. Safety Considerations:
The resulting document is expected:
to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):


c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
None.

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8. TC Member Review:
is not required for this SNARF.

Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS11/12/2025
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on