SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 04/01/2025Revised (if Applicable):

Document Number: 7362
SNARF for: New Standard: Guide for Pipeline Connection of TMA Delivery System in PV Deposition Equipment

Originating Global Technical Committee: Photovoltaic
Originating TC Chapter: China
Task Force (TF) in which work is to be carried out: PV Equipment Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
Deposition equipment usually uses the liquid delivery system when using TMA (Trimethylaluminum) in the cell factories of PV (Photovoltaic) industry. Double pipe of TMA is usually reserved in the equipment, which will be welded and connected with the utility piping system of the cell factory. Nevertheless, problems exist during the TMA pipe connection of equipment and utility, such as inconsistent specifications of reserved connections, inconsistent diameters and materials of double pipes, etc. These problems result in a large cost of time communicating and unifying connection methods, and also result in waste of manpower and material resources. Tests are required to be performed on the TMA pipe after being welded and connected. At present, there are problems of the pipe tests in PV industry such as unclear testing scope, inconsistent testing methods and standards. Therefore, we propose to develop a new standard to regulate the above-mentioned problems.


b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information: Equipment, Cell

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
1. This standard is based on GB 50646-2011 Technical code for special gas system engineering. It will give recommendations and examples on the types of reserved connections for TMA liquid delivery system pipes, as well as the size and material of double pipes.
1.1 It is recommended that the connection be a plain-end double pipe without any form of fittings.
1.2 In the double pipe, the outer diameter of the inner pipe is 1/4 inch, and the wall thickness is 0.035 inches. The outer diameter of the outer pipe is 1/2 inch, and the wall thickness is 0.049 inches. The outer diameter of the sliding pipe is 5/8 inches, and the wall thickness is 0.06 inches.
1.3 In the double pipe, the material of inner pipe, outer pipe and sliding pipe should be 316L electro polishing pipe.
2. This standard is based on GB∕T 36176-2018 Vacuum Technology - Vacuum leak testing method by helium mass spectrometer and SEMI F106 TEST METHOD FOR DETERMINATION OF LEAK INTEGRITY OF GAS DELIVERY SYSTEMS BY HELIUM LEAK DETECTOR. Five tests are required for the welding of double pipes, including pressurization testing, helium mass spectrometer vacuum leak testing, moisture testing, oxygen testing, and particle testing. In addition, the testing methods and acceptable standards will be specified.
3. This standard will recommend the contents that should be included in the test report.

b: Expected result of activity
New Standard or Safety Guideline (including replacement of an existing Standard or Safety Guideline)

For a new Subordinate Standard, identify the Primary Standard here:




For Standards, identify the Standard Subtype below:
Guide

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 05/14/2025b. 1st Draft by: 12/01/2025
c. (Optional) Informational Ballot by: d. Letter Ballot by: 07/01/2026
e. TC Chapter Approval By:12/01/2026

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)


b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):


c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
None.

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8. TC Member Review:
took place between (put dates below) before approval by the GCS, or

Member Review Start Date; 04/30/2025
Member Review End Date: 05/14/2025

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS05/14/2025
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on