SEMI International Standards TASK FORCE ORGANIZATION FORM (TFOF)

Date Prepared: 05/12/2026

Revised (if Applicable):

Name of Task Force (TF): S2 Airborne Chemicals Task Force

Global Technical Committee: EH&S

Originating Technical Committee Region: North America

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1. Charter: (State the objective of the proposed TF.)
Modify section 23.5 of SEMI S2 to allow for a more practicable compliance assessment processes
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2. Scope: (Define the specific activities that the TF will conduct.)
A single line item revision to SEMI S2 section 23.5 focusing mainly on paragraph 23.5, but making collateral changes in S2 as needed to support the core change (currently none are foreseen).
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3. Formal linkages with TFs in other Regions/Locales: (Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)

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4. Formation Date:(TF formed on)

Task Force formed on: 05/14/2026
Task Force approved by Committee/GCS on: 05/14/2026

5. Comments
None.