SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 04/14/2025Revised (if Applicable):

Document Number: 7380
SNARF for: Line Item Revision to SEMI E142-0225 - Specification for Substrate Mapping,
SEMI E142.1-0225 — Specification for XML Schema for Substrate Mapping,
SEMI E142.2-1016 (0225) — Specification for SECS II Protocol for Substrate Mapping,
SEMI E142.3-1016 (0225) — Specification for Web Services for Substrate Mapping,
SEMI E142.4-1022 (0225) — Specification for SECS II Protocol for Substrate Mapping Using Item Transfer

Originating Global Technical Committee: Information & Control
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Advanced Backend Factory Integration
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
As implementers use SEMI E142 and its subordinate standards, gaps and enhancements are identified.

This Line Item Revisions aims to address issues raised by Task Force Members.


b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information: Anyone who implements SEMI E142

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:

As part of the work on this Line-Item Revision, the task force will investigate:
    · Adding Well-Known Name (WKN) section
        o WKN are aliases used to ensure that implementers refer to variables, collection events and alarms defined in the Standard consistently.
        o Define WKN for Equipment Constant E142MapUpload defined in SEMI E142.4.
        o Determine if guidance is useful for WKN for the implementation specific collection events used for collection event E142SubstrateMapDataReady placeholder referred to in SEMI E142.4 (to notify the host when substrate map data is ready). E142SubstrateMapDataReady is a placeholder name for collection events that the implementation designates for this purpose (which may already have WKN defined by other SEMI Standards). For implementation specific events, it may be useful to have a consistent way to identify the events for this purpose.
    · Clarifying spelling of Hexadecimal.
        o Both ‘HexaDecimal’ and ‘hexadecimal’ are used.
        o XML Schema files specify enumeration value as ‘HexaDecimal’ and are case-sensitive. This spelling and capitalization need to be preserved to maintain backwards compatibility.
    · Correct error in E142 Figure R2-12-12.
        o Figure R2-12-12 Indexing Examples of Different AxisOrientation should be AxisDirection.
    · Correct errors in referencing FromSubstrateLayoutSpecifier TransferMap attribute.
        o SEMI E142 and E142.1 refers to ‘FromLayoutSpecifier’ when it should be ‘FromSubstrateLayoutSpecifier’
        o SEMI E142.2 A1-3 is missing the required ‘FromSubstrateLayoutSpecifier’ attribute.
    · Correct spelling of BottomSide in SEMI E142 Table 8 SubstrateMap Attributes shows SubstrateSide values as ‘TopSide’ or ‘Bottom Side’ (space between words) Schema states SubstrateSideEnum value as ‘TopSide’ or ‘BottomSide’ (no space between words)
Any other changes to address features or defects, or issues with the SEMI Style Guide raised by Task Force members during the development and review of the proposed changes related to these line item topics. Significant changes in scope still require a SNARF revision in compliance with SEMI Regulations


b: Expected result of activity
Line-item revision to an existing Standard or Safety Guideline

For a new Subordinate Standard, identify the Primary Standard here:


Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials, Addition of one or more Appendices or Complementary Files to an existing Standard or Safety Guideline, Addition of one or more Related Information sections or Various Materials to an existing Standard or Safety Guideline, Revision or addition of one or more Subordinate Standards to an existing Primary Standard

For Standards, identify the Standard Subtype below:
Specification

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 06/01/2025b. 1st Draft by: 06/01/2025
c. (Optional) Informational Ballot by: d. Letter Ballot by: 08/01/2025
e. TC Chapter Approval By:10/01/2025

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)


b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is no known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
None.

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8. TC Member Review:
is not required for this SNARF.

Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS06/04/2025
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on