SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 12/05/2024Revised (if Applicable):

Document Number: 7322
SNARF for: New Standard:Specification of Multiple Materials Substrate for GaN Epitaxial Growth for HB-LED

Originating Global Technical Committee: Compound Semiconductor Materials
Originating TC Chapter: China
Task Force (TF) in which work is to be carried out: GaN Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
1. Benefitting from advantages of wide bandgap, high electron mobility and high saturation velocity, gallium nitride (GaN) is identified as an excellent semiconductor for LED/high power/high frequency devices.
2. Due to the challenges of manufacturing large size bulk GaN substrates, the epitaxial growth on hetero-substrates, e.g. silicon, silicon carbide, as well as sapphire, is widely demanded despite the nonnegligible mismatches. Therefore, the specific substrates for GaN epitaxy directly determines the adoption of GaN in electronic and optoelectronic applications.
3. As a foundational material for manufacturing GaN electronic and optoelectronic devices, heterogeneous substrates are crucial in the entire industry chain, e. g. sapphire serves as the substrate for LEDs, silicon is used for power devices, and silicon carbide plays a crucial role in radio frequency devices.
4. In recent years, composite material substrates have gradually been a trend. They are rapidly developing in the field of high-directionality LED applications, and exhibit plenty of potentials in power electronic devices.
5. However, there is currently no existing standard for composite material substrates. Therefore, we aim to establish a standard to provide a basis for substrate material manufacturing and procurement for upstream and downstream companies in the industry chain, and finally to promote the healthy and orderly development of the industry.


b. Estimate effect on industry.
1: Major effect on entire industry or on multiple important industry sectors - identify the relevant sectors
Sector or Company Information: Light-emitting diodes, Power Device, Radio frequency devices

c. Estimate technical difficulty of the activity.
III: Difficult - Limited expertise and resources exist and/or achieving consensus is difficult

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:

1. Scope
2. Normative references
3. Terms and definitions
4. Technical requirements (technical parameters and indexes of Multiple Materials Substrate )
5. Inspection methods (measurement methods for each technical parameters of Multiple Materials Substrate )
6. Inspection regulations
7. Marking, packaging, transportation and storage

b: Expected result of activity
New Standard or Safety Guideline (including replacement of an existing Standard or Safety Guideline)

For a new Subordinate Standard, identify the Primary Standard here:




For Standards, identify the Standard Subtype below:
Specification

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 11/01/2024b. 1st Draft by: 10/01/2025
c. (Optional) Informational Ballot by: d. Letter Ballot by: 06/01/2026
e. TC Chapter Approval By:12/01/2026

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)


b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):


c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
None.

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8. TC Member Review:
took place between (put dates below) before approval by the GCS, or

Member Review Start Date; 11/25/2024.
Member Review End Date: 12/08/2024

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS12/05/2024
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on