SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 07/09/2026Revised (if Applicable):

Document Number: 7490
SNARF for:
New Standard: Safety Guideline for Autonomous Mobile Robots (AMR) in Semiconductor Manufacturing

Originating Global Technical Committee: EH&S
Originating TC Chapter: Korea
Task Force (TF) in which work is to be carried out: Robot Safety Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)

Autonomous Mobile Robots (AMRs) are being rapidly developed and deployed across industry, including the semiconductor. However, existing mobile-robot safety standards (e.g., ISO 3691-4) address general industry and do not account for the conditions and hazards specific to semiconductor fab environments, including operation in aisles and mini-environments shared with personnel, automated interaction with manufacturing equipment, cleanroom and process-driven constraints, and fab energy/material hazards.
This gap leaves AMR deployments in fabs without a tailored safety basis. This activity will:

(i) define the scope of AMRs for the fab context and,
(ii) develop a new SEMI Safety Guideline providing semiconductor-specific safety criteria for the design, deployment,
and operation of AMRs, for robot manufacturers, fab operators, and system integrators (SI).





b. Estimate effect on industry.
4: Slight effect or effect not determinable
Sector or Company Information:
Robot manufacturers that manufacture AMRs, and chip manufacturers that use these robots.

c. Estimate technical difficulty of the activity.
IV: Extremely Difficult - Expertise and resources are scarce and/or achieving consensus is very difficult

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:


This activity will develop a Safety Guideline for autonomous mobile robots (AMRs) and AMR systems used to perform tasks within semiconductor manufacturing or laboratory environments.
The guideline will address AMRs that navigate autonomously using onboard sensing and dynamic path planning. This includes everything from basic autonomous mobile robots for logistics transport to mobile robots with integrated manipulators.
Robots that utilize dynamic path planning are covered in this guideline, whereas UTVs (Unmanned Transport Vehicles) that move along fixed paths according to mechanical guidelines or guidelines are covered in SEMI S17.



b: Expected result of activity
New Standard or Safety Guideline (including replacement of an existing Standard or Safety Guideline)

For a new Subordinate Standard, identify the Primary Standard here:




For Standards, identify the Standard Subtype below:


Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 07/09/2026b. 1st Draft by: 03/01/2027
c. (Optional) Informational Ballot by: d. Letter Ballot by: 03/01/2027
e. TC Chapter Approval By:10/01/2029

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)
Japan, NA, and Taiwan, EHS TC Chapters, China CFG, Mobile Maintenance Robot Safety TF
China, Japan, NA, Taiwan, Korea I&C TC Chapters, Maintenance Robot Communication TF

b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will be issued – identify the recipient global technical committee(s):

Identify the recipient global technical committee(s):
Information & Control
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5. Safety Considerations:
The resulting document is expected:
to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):


c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
None.

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8. TC Member Review:
took place between (put dates below) before approval by the GCS, or

Member Review Start Date; 07/09/2026
Member Review End Date: 07/22/2026

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS07/30/2026
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on