SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 04/22/2025Revised (if Applicable):

Document Number: 7393
SNARF for: New Auxiliary Document: A Guide to Contamination Control for Parts and Critical Chamber Components

Originating Global Technical Committee: Metrics
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Critical Chamber Components (CCC) Test Methods Task Force
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
In advanced semiconductor processing, even irreducible differences in the components of identical tool chambers can affect yield and mean time between failures (MTBF). Along with known sources of contamination such as gases and chemicals, chamber components are also a common source of contamination in the tool. Eliminating contamination from these components can reduce downtime (including extended startup periods and preventative maintenance recovery time) and minimize the need for expanded wafer evaluation. To enhance tool utilization, it is recommended that fabs and OEMs adopt a systematic approach and employ advanced analytical techniques to quickly identify and address sources of contamination that may be introduced to the tool by critical chamber components.
This document outlines techniques for analyzing critical chamber components contaminants from various sources. It can be used to:
1. Guide experiments that segment the fab process and OEM tool assembly procedures (including their supply chains) to identify contamination entry points and
2. Recommend characterization techniques to determine the composition of contaminants entering the tool from different sources (i.e., present in various materials).


b. Estimate effect on industry.
3: Major effect on a few companies - identify the relevant companies
Sector or Company Information: OEMs (Original Equipment Manufacturers), Parts Cleaning vendors

c. Estimate technical difficulty of the activity.
I: No Difficulty - Proven concepts and techniques exist or quick agreement is anticipated

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
Each section of the document describes a specific source of the contamination (how the contamination is entering the tool). These sections list the commonly used analytical techniques that can be applied to analyzing the row-specific source for the column-specific contaminant. For each analytical technique listed, the reader is also supplied with information pertaining to applications, limitations, and other contributing factors.

The scope of this document is to describe the multiple sources of contamination that may be introduced to a critical chamber component (CCC) during cleaning and handling processes that take place prior to the installation of the CCC into the tool. Scope also includes commonly used analytical techniques that can identify and measure contaminants. “Installation” should be considered to begin at the time that the critical chamber component is removed from its packaging for purposes of installing it into the tool.

b: Expected result of activity
New Auxiliary Information

For a new Subordinate Standard, identify the Primary Standard here:




For Standards, identify the Standard Subtype below:
Miscellaneous (describe below)

Miscellaneous (describe below):
Auxilary Document
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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 04/01/2025b. 1st Draft by: 05/15/2025
c. (Optional) Informational Ballot by: d. Letter Ballot by: 06/01/2025
e. TC Chapter Approval By:10/01/2025

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)


b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):


c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
None.

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8. TC Member Review:
is not required for this SNARF.

Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS06/05/2025
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on