SEMI International Standards
TASK FORCE ORGANIZATION FORM (TFOF)
Date Prepared:
11/09/2010
Revised (if Applicable):
02/10/2026
Name of Task Force (TF):
SEMI F51 Revision Task Force
Global Technical Committee:
Facilities
Originating Technical Committee Region:
North America
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1. Charter:
(State the objective of the proposed TF.)
SEMI F51, Guide for Elastomeric Sealing Technology, is overdue for its five-year review. The reapproval ballot received numerous inputs that should be addressed through a revision effort. . This Task Force will gather industry stakeholders and work toward updating the F51 standard to reflect current industry guidelines.
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2. Scope:
(Define the specific activities that the TF will conduct.)
This Task Force will:
· Revise SEMI F51 based on inputs received from the Reapproval Ballot
· Seek industry stakeholders feedback, including input from from SEMI Technology Collaborations (e.g., SCIS)
· Update Standard to conform to the Style Manual, PM, and Regs
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3. Formal linkages with TFs in other Regions/Locales:
(Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
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4. Formation Date:
(TF formed on)
Task Force formed on:
11/09/2010
Task Force approved by Committee/GCS on:
02/10/2026
5. Comments
Task Force formed 11/09/2010
TFOF revised approved via TC Chapter during NA Winter Meetings 2026
