SEMI International Standards
TASK FORCE ORGANIZATION FORM (TFOF)
Date Prepared:
03/06/2026
Revised (if Applicable):
Name of Task Force (TF):
Robot Safety Task Force
Global Technical Committee:
EH&S
Originating Technical Committee Region:
Korea
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1. Charter:
(State the objective of the proposed TF.)
With the rapid deployment of service robots in semiconductor FAB/INFRA manufacturing sites, clear safety requirements and regulatory alignment are not yet sufficiently established.
The Robot Safety Task Force (TF) aims to develop safety management guidelines and propose standardized guidelines tailored to semiconductor manufacturing environments, in collaboration with global experts.
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2. Scope:
(Define the specific activities that the TF will conduct.)
The TF will:
1. Review applicable international standards (e.g., ISO and IEC series) related to service robot safety and certification.
2. Analyze safety risks specific to semiconductor FAB/INFRA environments.
3. Develop safety management criteria tailored to usage conditions, robot types
4. Evaluate testing methodologies applicable to semiconductor manufacturing sites.
5. Propose the framework for a future SEMI S standard for service robots in semiconductor FAB/INFRA facilities.
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3. Formal linkages with TFs in other Regions/Locales:
(Show each associated TF and its parent global technical committee; indicate nature of relationship – global TF, observer TF, etc.)
NA, Japan, Taiwan, EU EHS TC Chapters
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4. Formation Date:
(TF formed on)
Task Force formed on:
03/06/2026
Task Force approved by Committee/GCS on:
03/06/2026
5. Comments
None.
