SEMI International Standards
Standards New Activity Report Form (SNARF)
Date Prepared: 07/02/2026Revised (if Applicable):

Document Number: 7488
SNARF for: Line-Item Revision to
SEMI E120-1225 Specification for the Common Equipment Model (CEM),
SEMI E120.2-1225 Specification for Protocol Buffers for Common Equipment Model (CEM),
SEMI E125-1225 Specification for Equipment Self Description (EqSD),
SEMI E125.2-1225 Specification for Protocol Buffers for Equipment Self Description (EqSD),
SEMI E132-1225 Specification for Equipment Client Authentication and Authorization,
SEMI E132.2-1225 Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA),
SEMI E134-1225 Specification for Data Collection Management,
SEMI E134.2-1225 Specification for Protocol Buffers of Data Collection Management, and
SEMI E179-1225 Specification for Protocol Buffers Common Components

Originating Global Technical Committee: Information & Control
Originating TC Chapter: North America
Task Force (TF) in which work is to be carried out: Diagnostic Data Acquisition Task Force NA
Note: If a new task force is needed, also submit a task force organization form (TFOF)

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1. Rationale:
a. Describe the need or problem addressed by this activity.
(Indicate the customer, what benefits they will receive, and if possible, quantify the impact on the return on investment [ROI] if the Document is implemented.)
As members implement the EDA Freeze 3 standards, some issues have been reported that need to be resolved in the Standards.

Note 1 - Another Line Item Revision to the EDA Core Standards (Document #7419A) passed TC Chapter review at the North America Spring 2026 Information & Control Technical Committee meeting. A Ratification Ballot (R7419A) was issued in Cycle 5 – 2026 voting to confirm technical changes. Per SEMI regulations, this Line Item Revision will not update any content modified by Ballot 7419A and R7419A since they are not yet published.

Note 2 – This SNARF lists all the EDA Core Standards in the Line Item Revision (SEMI E120, E120.2

E125, E125.2, E132, E132.2, E134, E134.2, E179). This is done so that if technical changes are required to related SEMI standards, a new SNARF does not need to be created before ballot submission deadline. The ballot submitted for voting will clearly state which Standards are proposed to be updated as part of the Line Item Revision ballot.


b. Estimate effect on industry.
2: Major effect on an industry sector - identify the relevant sector
Sector or Company Information: Anyone implementing EDA servers or clients

c. Estimate technical difficulty of the activity.
II: Some Difficulty - Disagreements on known requirements exist but developing consensus is possible

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2. Scope:
a: Describe the technical areas to be covered or addressed by this Document development activity. For Subordinate Standards, list common concepts or criteria that the Subordinate Standard inherits from the Primary Standard, as well as differences from the Primary Standard:
As part of this Line Item Revision, the Task Force will investigate the following items:

A previous ballot (Ballot 7321B) made changes to SEMI E125 GetParameters() to state that returned parameters are directly and indirectly referenced by the equipment node description. It did not remove a requirement in Table 26 Parameter Attribute Definition that parameters shall be listed as ParameterReference in at least one equipment node. The intention was to avoid metadata mismatch by having non-transient parameters referenced directly (in equipment node description’s ParametersReference) and transient parameters referenced indirectly through the equipment node description’s objects (events, exceptions, etc.). This requirement in Table 26 conflicts with the intention. Updating this requirement was missed in Ballot 7321B and we are proposing updates to correct the issue so we don’t have inconsistent metadata. As part of this investigation, review if SEMI E134 Data Collection Plan Management needs any clarifications.

Any other changes to address features or defects, or issues with the Style Guide raised by Task Force members during the development and review of the proposed changes related to these line item topics. Significant changes in scope still require a SNARF revision in compliance with SEMI Regulations.

b: Expected result of activity
Line-item revision to two or more existing Standards or Safety Guidelines

For a new Subordinate Standard, identify the Primary Standard here:


Modification of an existing part of Standard(s) or Safety Guideline(s) including Appendices, Complementary Files, and Supplementary Materials, Addition of one or more Appendices or Complementary Files to an existing Standard or Safety Guideline, Addition of one or more Related Information sections or Various Materials to an existing Standard or Safety Guideline, Revision or addition of one or more Subordinate Standards to an existing Primary Standard

For Standards, identify the Standard Subtype below:
Specification

Miscellaneous (describe below):

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3. Projected Timetable for Completion:

a: General Milestones
a. Activity Start: 07/01/2026b. 1st Draft by: 07/01/2026
c. (Optional) Informational Ballot by: d. Letter Ballot by: 07/01/2026
e. TC Chapter Approval By:10/01/2026

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4. Liaisons with other Global Technical Committees/TC Chapters/Subcommittees/TFs:
a. List SEMI global technical committees, TC Chapters, subcommittees, or task forces in your or other Regions/Locales that should be kept informed regarding the progress of this activity. (Refer to SEMI Standards organization charts and global technical committee charters and scopes as needed.)


b. List any planned Type I Liaisons with external nonprofit organizations (e.g., SDO) that should receive Draft Documents from Standards staff for feedback during this activity and be notified when the Letter Ballot is issued (refer to Procedure Manual § 7):


c. Intercommittee Ballots:
will not be issued

Identify the recipient global technical committee(s):

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5. Safety Considerations:
The resulting document is expected:
NOT to be a Safety Guideline

NOTE FOR "to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is NOT technically sound and complete - Refer to Section 15.1 of the Regulations for special procedures to be followed.

NOTE FOR "NOT to be a Safety Guideline": When all safety-related information is removed from the Document, the Document is still technically sound and complete.

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6. Intellectual Property Considerations:
Note: Both a: and b: below should be checked for Revision of existing Standard(s) and Safety Guideline(s).

a. For a new Standard or Safety Guideline and for any part to be modified or added in a Revision of published Standards and Safety Guidelines:
the use of patented technology is NOT required.

If "patented technology is intended to be included in the proposed Standard(s) or Safety Guideline(s) " is selected above, then also check one:


b. For Revision, Reapproval, Reinstatement, or Withdrawal of existing Standard(s) and Safety Guideline(s):
there is previously known material patented technology necessary to use or implement the Standard(s) and Safety Guideline(s)

c. The body of the Document and any Appendices, Complementary Files, Related Information sections, or Various Materials that may or may not be a part of the Document by reference:
the incorporation of Copyrighted Item will NOT be required



NOTE FOR ‘the use of patented technology or the incorporation of Copyrighted Item(s) is NOT required’: If in the course of developing the Document, it is determined that the use of patented technology or Copyrighted Item(s) is necessary for the Document, the provisions of Regulations § 16 must be followed.

NOTE FOR ’will incorporate Copyrighted Item’: A copyright release letter must be obtained from the copyright owner prior to publication.

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7. Comments, Special Circumstances:
SEMI E120, E120.2, E132, E132.2, E125, E125.2, E134, E134.2 and E179 included patent material and is covered by NON-ASSERTION AGREEMENT (LOA) between SEMI and Asyst Technologies has been signed with for US Patents #11/340101, #11/107508, #09/899833, and 09/496009, in 2007. This agreement is maintained by PEER Group, who has acquired the patents and patent applications previously owned by Asyst Technologies

No intent to add new patent material as part of this Line Item Revision.

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8. TC Member Review:
is not required for this SNARF.

Member Review Start Date; None.
Member Review End Date: None.

NOTE FOR ‘TC Member Review’ is required by the Regulations for a period of at least two weeks
before approval of a new, or a major revision of an existing, Standard or Safety Guideline. (Refer to Regulations ¶ 8.2.1)
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9. SNARF Approval Dates:
TC Chapter or GCS07/24/2026
Recorded in TC Minutes

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10. SNARF Extension Dates:
TC Chapter Extension Granted on
Extension Expires on