SEMI International Standards
New Task Forces and Activities


Below you will find a list of recently created Standards task forces and new activities. Please click on a particular task force or document, for more information.

Show details for 3D Packaging and Integration Committee3D Packaging and Integration Committee
Show details for EH&S CommitteeEH&S Committee
Show details for Facilities CommitteeFacilities Committee
Show details for Flat Panel Display (FPD) - Materials & Components CommitteeFlat Panel Display (FPD) - Materials & Components Committee
Show details for Flat Panel Display (FPD) - Metrology CommitteeFlat Panel Display (FPD) - Metrology Committee
Show details for Gases CommitteeGases Committee
Show details for Information & Control CommitteeInformation & Control Committee
Show details for Liquid Chemicals CommitteeLiquid Chemicals Committee
Show details for MEMS / NEMS CommitteeMEMS / NEMS Committee
Hide details for Physical Interfaces & Carriers CommitteePhysical Interfaces & Carriers Committee
SNARF Doc 7483 - New Standard: Specification for Process Cell Anchoring
SNARF Doc 7484 - New Standard: Specification for Mainframe Garage and Process Cell Envelope Dimensions
SNARF Doc 7497 - New Standard: Specification for Utility Connection between Process Cell and Garage in Mainframe System
SNARF Doc 7498 - New Standard: Specification for 310mm Square Panel Loadport
SNARF Doc 7515 - Line-Item Revision to SEMI Exxx: Specification for Container for Transport and Storage of Transmission Electron Microscope (TEM) Lamella Carriers within Electron Microscopy Workflows
Show details for Silicon Wafer CommitteeSilicon Wafer Committee
Show details for Traceability CommitteeTraceability Committee


If you have any questions concerning a specifc task force or document, please contact a SEMI Standards staff nearest you.