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New Task Forces and Activities
Below you will find a list of recently created Standards task forces and new activities. Please click on a particular task force or document, for more information.
3D Packaging and Integration Committee
Automation Technology Committee
EH&S Committee
SNARF
Doc 7469 - Line item Revision SEMI S2-0724E Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
SNARF
Doc 7470 - Revision of SEMI S5, Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gases
SNARF
Doc 7485 - Revision to SEMI S14-0521 - Safety Guideline for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment (Fire Protection)
SNARF
Doc 7490 -
New Standard: Safety Guideline for Autonomous Mobile Robots (AMR) in Semiconductor Manufacturing
TFOF
Flow Limitting Devices Task Force
TFOF
S2 Airborne Chemicals Task Force
Facilities Committee
Flat Panel Display (FPD) - Metrology Committee
Information & Control Committee
Liquid Chemicals Committee
Physical Interfaces & Carriers Committee
Silicon Wafer Committee
Traceability Committee
If you have any questions concerning a specifc task force or document, please
contact a SEMI Standards staff
nearest you.
Back to SEMI Standards Committee Info
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