 | | | | | | | |
 | 3D Packaging and Integration Committee |
| |
 | Automation Technology Committee |
| |
 | EH&S Committee |
| |
 | Facilities Committee |
| |
 | Flat Panel Display (FPD) - Metrology Committee |
| |
 | Information & Control Committee |
| |
| SNARF | | | | | Doc 7475 - Line Item Revision to E90-1224, SPECIFICATION FOR SUBSTRATE TRACKING and E90.1-1224, SPECIFICATION FOR SECS-II PROTOCOL SUBSTRATE TRACKING |  |
| SNARF | | | | | Doc 7476 - New Standard: GUIDE FOR MAINTENANCE ROBOT COMMUNICATIONS |  |
| SNARF | | | | | Doc 7478 - Revision to SEMI E95-1101: Specification for Human Interface for Semiconductor Manufacturing Equipment and Revision to Add a New Subordinate Standard: Specification on Communicating Safety Information in Human Interfaces to SEMI E095-1011: Specification for Human Interface for Semiconductor Manufacturing Equipment |  |
| SNARF | | | | | Doc 7480 - New Standard: Specification for Equipment Edge Data Integration |  |
| SNARF | | | | | Doc 7487 - Line Item Revision to SEMI E190-1124 – Specification for Equipment Data Publication (EDP) |  |
| SNARF | | | | | Doc 7488 - Line-Item Revision to
SEMI E120-1225 Specification for the Common Equipment Model (CEM),
SEMI E120.2-1225 Specification for Protocol Buffers for Common Equipment Model (CEM),
SEMI E125-1225 Specification for Equipment Self Description (EqSD),
SEMI E125.2-1225 Specification for Protocol Buffers for Equipment Self Description (EqSD),
SEMI E132-1225 Specification for Equipment Client Authentication and Authorization,
SEMI E132.2-1225 Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA),
SEMI E134-1225 Specification for Data Collection Management,
SEMI E134.2-1225 Specification for Protocol Buffers of Data Collection Management, and
SEMI E179-1225 Specification for Protocol Buffers Common Components |  |
| SNARF | | | | | Doc 7489 - Line Item Revision to E5-0725, Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II), E30-0725, Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM) |  |
| SNARF | | | | | Doc 7491 - Line Item Revision to SEMI E40-0226: Specification for Processing Management and SEMI E40.1-0226: Specification for SECS-II Protocol for Processing Management |  |
| SNARF | | | | | Doc 7492 - Line Item Revision to SEMI E94-0226 - Specification for Control Job Management and SEMI E94.1-0226 — Specification for SECS-II Protocol for Control Job Management (CJM) |  |
| SNARF | | | | | Doc 7493 - Line Item Revision to SEMI E87-0225: Specification for Carrier Management (CMS), SEMI E87.1-0225: Specification for SECS-II Protocol for Carrier Management (CMS), SEMI E172-0725: SEMI E172 - Specification for SECS Equipment Data Dictionary (SEDD) |  |
| TFOF | | | | | Diagnostic Data Acquisition Task Force |  |
 | Liquid Chemicals Committee |
| |
 | Physical Interfaces & Carriers Committee |
| |
 | Silicon Wafer Committee |
| |
 | Traceability Committee |
| |