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New Task Forces and Activities
Below you will find a list of recently created Standards task forces and new activities. Please click on a particular task force or document, for more information.
3D Packaging and Integration Committee
EH&S Committee
Facilities Committee
Flat Panel Display (FPD) - Metrology Committee
Gases Committee
Information & Control Committee
Liquid Chemicals Committee
Physical Interfaces & Carriers Committee
SNARF
Doc 7453 - New Standard: Specification for 310mm Square Panel FOUP
SNARF
Doc 7454 - Line Item Revision to SEMI E100-1104 (Reapproved 0710) SPECIFICATION FOR A RETICLE SMIF POD (RSP) USED TO TRANSPORT AND STORE 6 INCH OR 230 mm RETICLES
SNARF
Doc 7455 - Line Item Revision to E182.3 - Specification for Panel FOUP load port with ground based delivery exclusion volume
Silicon Wafer Committee
If you have any questions concerning a specifc task force or document, please
contact a SEMI Standards staff
nearest you.
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