SEMI International Standards
| Standards Locale: North America |
| Committee: EHS |
| Place of Meeting: SEMI HQ, San Jose, CA |
| Date of Meeting: 11/05/2015 |
| Meeting End Date: 11/05/2015 |
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| Recording SEMI Standards Staff: Kevin Nguyen |
| CER Posted to Web: 11/09/2015 |
Leadership Changes
Group | Previous Leader | New Leader |
Hazardous Energy Control Isolation Devices Task Force was renamed to
Control of Hazardous Energy (CoHE) Task Force | | |
Committee Structure Changes
None.
Ballot Results
Document # | Document Title | Committee Action | A&R Forms for Approved Ballots |
| Cycle 7, 2015 Ballots | | |
4316M | Line Item Revision to SEMI S2-0715, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment, and SEMI S22-0715, Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment. Delayed Revision related to Fail-to-safe Equipment Control Systems (FECS) | |  4316MProceduralReview.pdf |
Line Item 1 | Clarification/Improvement of the FECS criteria | Passed with editorial changes | |
4449F | Line Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. Delayed Revisions related to Work at Elevated Locations and Design Criteria for Platforms, Steps, and Ladders | |  4449FProceduralReview.pdf |
Line Item 1 | Addition of a Delayed Revisions Section Related to Work at Elevated Locations and Design Criteria for Platforms, Steps, and Ladders | Passed with editorial changes | |
4683G | Line Item Revision to SEMI S2-0715, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. Delayed Revisions Related to Chemical Exposure | |  4683G-LI1 Compiled Responses_jbv inputs.pdf |
Line Item 1 | Delayed Revisions Related to Chemical Exposure Criteria | Failed, to be reballoted | |
5892 | Revision to SEMI S5-0310 With Title Change From: Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gas Cylinder Valves To: Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gases | Passed with editorial changes |  5892ProceduralReview.pdf |
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
# | Type | SC/TF/WG | Details |
| 5957 | SNARF | Control of Hazardous Energy (CoHE) TF | Line Item Revision of SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. ( Re: Control of Hazardous Energy) |
| 5958 | SNARF | S27 Revision TF | Line Item Revision of S27, Safety Guideline for the Contents of Environmental, Safety, and Health (ESH) Evaluation Reports |
| 4625 | SNARF | S6 Revision TF | Line Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (Revisions related to ventilation)
SNARF was abolished. |
Authorized Ballots
# | When | SC/TF/WG | Details |
| 5761A | Cycle 1 or 2, 2016 | Energetic Materials EHS TF | New Standard: Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes |
| 5969 | Cycle 1 or 2, 2016 | Fire Protection TF | Line Item Revision to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment.
(pertaining to Fire) |
| 5970 | Cycle 1 or 2, 2016 | Fire Protection TF | Line Item Revision to SEMI S14, Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment
(pertaining to alignment with SEMI S10 ) |
| 5625 | Cycle 1 or 2, 2016 | S2 Non-Ionizing Radiation TF | Line Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. Delayed Revisions Related to Non-Ionizing Radiation |
| 4683H | Cycle 1 or 2, 2016 | S2 Chemical Exposure TF | Line Item Revision to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment.
Delayed Revisions Related to Chemical Exposure |
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
April 7, 2016 at SEMI HQ, San Jose, CA. For more information, please visit: http://www.semi.org/standards
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