SEMI International Standards
| Standards Locale: North America |
| Committee: Information & Control |
| Place of Meeting: Milpitas |
| Date of Meeting: 11/08/2023 |
| Meeting End Date: |
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| Recording SEMI Standards Staff: Michelle Sun |
| CER Posted to Web: 11/22/2023 |
Leadership Changes
WG/TF/SC/TC Name | Previous Leader | New Leader |
| ABFI Task Force | Luis Lim (Miracom) | Peter Meusburger (Besi) |
| ABFI Task Force | Luis Lim (Miracom) | Jason Cicero (Micron) |
Committee Structure Changes
None.
Ballot Results
Document # | Document Title | TC Chapter Action | A&R Forms for Approved Ballots |
| 6743B | Revision to SEMI E95-1101, Specification for Human Interface for Semiconductor Manufacturing Equipment | Failed | |
| 6836 | Line Item Revision to SEMI E87-0921, Specification for Carrier Management (CMS) and SEMI E87.1-0921, Specification for SECS-II Protocol for Carrier Management (CMS) and SEMI E90-0921, Specification for Substrate Tracking and E90.1-0312 (Reapproved 0921), Specification for SECS-II Protocol Substrate Tracking | | |
| LI-1 | Add name-value pair attributes to SEMI E90 substrate and SEMI E87 carrier objects for additional information. | Failed | |
| 6846 | Reapproval of SEMI E54.1-0316, Specification for Sensor/Actuator Network Common Device Model | Passed |  AR - 6846.pdf |
| 6847 | Reapproval of SEMI E54.2-0316, Guide for Writing Sensor/Actuator Network (SAN) Letter Ballots | Passed |  AR - 6847.pdf |
| 6849 | Reapproval of SEMI E54.24-1116, Specification for Sensor/Actuator Network Specific Device Model of a Generic Equipment Networked Sensor (GENsen) | Passed |  AR - 6849.pdf |
| 6926 | New Standard: Specification for Equipment Operator Access Management and Monitoring | Failed | |
| 6948 | Line Item Revisions to SEMI E142-0921 - Specification for Substrate Mapping, SEMI E142.1-0921 - Specification for XML Schema for Substrate Mapping, Line Item Revision to SEMI E142.2-0921 - Specification for SECS II Protocol For Substrate Mapping, Line Item Revision to SEMI E142.3-0921 - Specification for Web Services Protocol for Substrate Mapping, Line Item Revision to SEMI E142.4-0921 - Specification for Secs II Protocol For Substrate Mapping Using Item Transfer | |  AR - 6948.pdf |
| LI-1 | Add TnR, Panel, PCB to SubstrateTypeEnum in schema | Passed | |
| LI-2 | Correct capitalization for all substrate types | Passed | |
| LI-3 | Add a DeviceData map example to Related Information 1 Map Examples | Passed | |
| LI-4 | Add diagrams to help clarify E142 usage for all substrate types to related information | Passed with editorial changes | |
| 7063 | Reapproval of SEMI E39-1218, Specification for Object Services: Concepts, Behavior, and Services | Passed |  AR - 7063.pdf |
| 7066A | Line Item Revision to SEMI E87-0921, Specification for Carrier Management (CMS) and SEMI E87.1-0921, Specification for SECS-II Protocol for Carrier Management (CMS) | |  AR - 7066A.pdf |
| LI-1 | Rework Carrier Ready to Unload Prediction (CaRTUP) functionality into Carrier Complete Prediction (CCP) functionality and address gaps | Passed | |
| 7114 | Line Item Revision to SEMI E5-0323, Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM) and SEMI E30-0423, Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM) | |  AR - 7114.pdf |
| LI-1 | Well-Known Names for E5, E30 | Passed with editorial changes | |
| LI-2 | E30, E5 Errata | Passed | |
| 7115 | Line Item Revision to SEMI E40-1218, Specification for Processing Management and SEMI E40.1-1218, Specification for SECS-II Protocol for Processing Management | |  AR - 7115.pdf |
| LI-1 | Well-Known Names for E40 | Passed with editorial changes | |
| 7116 | Line Item Revision to SEMI E87-0921, Specification for Carrier Management (CMS) and SEMI E87.1-0921, Specification for SECS-II Protocol for Carrier Management (CMS) | |  AR - 7116.pdf |
| LI-1 | Well-Known Names for E87 | Passed with editorial changes | |
| LI-2 | E87 Errata | Passed | |
| LI-3 | E87, E87.1 Technical Improvements and Clarifications | Passed, Ratification Ballot to be Issued | |
| 7117 | Line Item Revision to SEMI E90-0921, Specification for Substrate Tracking and SEMI E90.1-0312 (Reapproved 0921), Specification for SECS-II Protocol Substrate Tracking | |  AR - 7117.pdf |
| LI-1 | Well-Known Names for E90 | Passed, Ratification Ballot to be Issued | |
| LI-2 | DV Clarification for E90 | Passed | |
| 7118 | Line Item Revision to SEMI E94-0314 (Reapproved 0819), Specification for Control Job Management and SEMI E94.1-0312 (Reapproved 0819), Specification for SECS-II Protocol for Control Job Management (CJM) | |  AR - 7118.pdf |
| LI-1 | Well-Known Names for E94 | Passed with editorial changes | |
| 7119 | Line Item Revision to SEMI E116-0623, Specification for Equipment Performance Tracking and SEMI E116.1-0623, Specification for SECS-II Protocol for Equipment Performance Tracking (EPT) | |  AR - 7119.pdf |
| LI-1 | Well-Known Names for E116 | Passed with editorial changes | |
| 7120 | Line Item Revision to SEMI E157-0611, Specification for Module Process Tracking | |  AR - 7120.pdf |
| LI-1 | Well-Known Names for E157 | Passed with editorial changes | |
| 7121 | Reapproval of SEMI E39.1-1218, Specification for SECS-II Protocol for Object Services (OSS) | Passed |  AR - 7121.pdf |
| 7123 | Reapproval of SEMI E54.10-0600 (Reapproved 1017), Specification for Sensor/Actuator Network Specific Device Model for an In Situ Particle Monitor Device | Passed |  AR - 7123.pdf |
| 7125 | Reapproval of SEMI E133.1-0318 - Specification for XML Messaging for Process Control System (PCS) | Passed |  AR - 7125.pdf |
| 7126 | Reapproval of SEMI E145-0414 (Reapproved 0519), Classification for Measurement Unit Symbols in XML | Passed |  AR - 7126.pdf |
| 7127 | Reapproval of SEMI E128-0414 (Reapproved 0519), Specification for XML Message Structures | Passed |  AR - 7127.pdf |
| 7128 | Reapproval of SEMI E138-0217, Specification for XML Semiconductor Common Components | Passed |  AR - 7128.pdf |
Ratification Ballot Results
Document # | Document Title | ISC A&R Action | A&R Forms |
| R6924A | New Standard: Specification for Equipment Management of Consumables and Durables (EMCD) | Passed |  R6924A_ProceduralReview.pdf |
| R6925A | New Subordinate Standard: Specification for SECS-II Protocol for Equipment Management of Consumables and Durables (EMCD) | Passed |  R6925A_ProceduralReview.pdf |
Activities Approved by the GCS between meetings of TC Chapter meeting
# | Type | SC/TF/WG | Details |
| 7063 | Ballot Authorization | GEM300 TF | Reapproval of SEMI E39-1218, Specification for Object Services: Concepts, Behavior, and Services |
Authorized Activities
# | Type | SC/TF/WG | Details |
| 7175 | SNARF | DDA TF | Line Item Revision to SEMI E132-0923 Specification for Equipment Client Authentication and Authorization and SEMI E132.2-0923 Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA) |
| 7176 | SNARF | DDA TF | Line Item Revision to SEMI E134-0923 Specification for Data Collection Management and SEMI E134.2-0923 Specification for Protocol Buffers of Data Collection Management |
| 7174 | SNARF | DDA TF | Line Item Revision to SEMI E128-0414 (Reapproved 0519), Specification for XML Message Structures |
| 7178 | SNARF | DDA TF | Revision to SEMI E164-0414 (0721), Specification for EDA Common Metadata |
| 7179 | SNARF | DDA TF | Revision to Add a New Subordinate Standard: Specification for EDA Common Metadata for Generic Model for Communication and Control of Manufacturing Equipment (GEM) to SEMI E164-0414 (0721), Specification for EDA Common Metadata |
| 7180 | SNARF | DDA TF | Revision to Add a New Subordinate Standard: Specification for EDA Common Metadata for Processing Management to SEMI E164-0414 (0721), Specification for EDA Common Metadata |
| 7181 | SNARF | DDA TF | Revision to Add a New Subordinate Standard: Specification for EDA Common Metadata for Carrier Management (CMS) to SEMI E164-0414 (0721), Specification for EDA Common Metadata |
| 7182 | SNARF | DDA TF | Revision to Add a New Subordinate Standard: Specification for EDA Common Metadata for Substrate Tracking to SEMI E164-0414 (0721), Specification for EDA Common Metadata |
| 7183 | SNARF | DDA TF | Revision to Add a New Subordinate Standard: Specification for EDA Common Metadata for Control Job Management to SEMI E164-0414 (0721), Specification for EDA Common Metadata |
| 7184 | SNARF | DDA TF | Revision to Add a New Subordinate Standard: Specification for EDA Common Metadata for Equipment Performance Tracker to SEMI E164-0414 (0721), Specification for EDA Common Metadata |
| 7185 | SNARF | DDA TF | Revision to Add a New Subordinate Standard: Specification for EDA Common Metadata for Time Synchronization and Definition of the TS-Clock Object to SEMI E164-0414 (0721), Specification for EDA Common Metadata |
| 7186 | SNARF | DDA TF | Revision to Add a New Subordinate Standard: Specification for EDA Common Metadata for Module Process Tracking to SEMI E164-0414 (0721), Specification for EDA Common Metadata |
| 7177 | SNARF | Sensor Bus TF | Line Item Revision to SEMI E54.20-0316 Specification for Sensor/Actuator Network Communications for EtherCAT |
| 7188 | SNARF | Sensor Bus TF | Withdrawal of SEMI E54.15-1107 Sensor/Actuator Network Communication Specification for SafetyBUS p |
| 7189 | SNARF | Sensor Bus TF | Withdrawal of SEMI E54.16-1106 (Reapproved 1211) Specification for Sensor/Actuator Network Communications for Lonworks |
| 7190 | SNARF | Sensor Bus TF | Line Item Revision to SEMI E54.19 - Specification for Sensor/Actuator Network for MECHATROLINK |
Authorized Ballots
# | When | TF | Details |
| R7116 | Cycle 9-2023 | GEM300 TF | Line Item Revision to SEMI E87-0921, Specification for Carrier Management (CMS) and SEMI E87.1-0921, Specification for SECS-II Protocol for Carrier Management (CMS) |
| R7117 | Cycle 9-2023 | GEM300 TF | Line Item Revision to SEMI E90-0921, Specification for Substrate Tracking and SEMI E90.1-0312 (Reapproved 0921), Specification for SECS-II Protocol Substrate Tracking |
| 6743C | Cycle 2-2024 | GUI TF | Revision to SEMI E95-1101, Specification for Human Interface for Semiconductor
Manufacturing Equipment |
| 6926A | Cycle 2-2024 | CDS TF | New Standard: Specification for Equipment Operator Access Management and Monitoring |
| 6836A | Cycle 2-2024 | GEM300 TF | Line Item Revision to SEMI E87-0921, Specification for Carrier Management (CMS) and SEMI E87.1-0921, Specification for SECS-II Protocol for Carrier Management (CMS) and SEMI E90-0921, Specification for Substrate Tracking and E90.1-0312 (Reapproved 0921), Specification for SECS-II Protocol Substrate Tracking |
| 7067 | Cycle 2-2024 | PCS TF | Line Item Revision to SEMI E133-1218, Specification for Automated Process Control Systems Interface and SEMI E133.1-0318, Specification for XML Messaging for Process Control System (PCS) |
| 7177 | Cycle 2-2024 | Sensor Bus TF | Line Item Revision to SEMI E54.20-0316 Specification for Sensor/Actuator Network Communications for EtherCAT |
| 7188 | Cycle 2-2024 | Sensor Bus TF | Withdrawal of SEMI E54.15-1107 Sensor/Actuator Network Communication Specification for SafetyBUS p |
| 7189 | Cycle 2-2024 | Sensor Bus TF | Withdrawal of SEMI E54.16-1106 (Reapproved 1211) Specification for Sensor/Actuator Network Communications for Lonworks |
| 7190 | Cycle 2-2024 | Sensor Bus TF | Line Item Revision to SEMI E54.19 - Specification for Sensor/Actuator Network for MECHATROLINK |
| 7175 | Cycle 2-2024 | DDA TF | Line Item Revision to SEMI E132-0923 Specification for Equipment Client Authentication and Authorization and SEMI E132.2-0923 Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA) |
| 7176 | Cycle 2-2024 | DDA TF | Line Item Revision to SEMI E134-0923 Specification for Data Collection Management and SEMI E134.2-0923 Specification for Protocol Buffers of Data Collection Management |
| 7174 | Cycle 2-2024 | DDA TF | Line Item Revision to SEMI E128-0414 (Reapproved 0519), Specification for XML Message Structures |
| 7178 | Cycle 2-2024 | DDA TF | Revision to SEMI E164-0414 (0721), Specification for EDA Common Metadata |
| 7179 | Cycle 2-2024 | DDA TF | Revision to Add a New Subordinate Standard: Specification for EDA Common Metadata for Generic Model for Communication and Control of Manufacturing Equipment (GEM) to SEMI E164-0414 (0721), Specification for EDA Common Metadata |
| 7180 | Cycle 2-2024 | DDA TF | Revision to Add a New Subordinate Standard: Specification for EDA Common Metadata for Processing Management to SEMI E164-0414 (0721), Specification for EDA Common Metadata |
| 7181 | Cycle 2-2024 | DDA TF | Revision to Add a New Subordinate Standard: Specification for EDA Common Metadata for Carrier Management (CMS) to SEMI E164-0414 (0721), Specification for EDA Common Metadata |
| 7182 | Cycle 2-2024 | DDA TF | Revision to Add a New Subordinate Standard: Specification for EDA Common Metadata for Substrate Tracking to SEMI E164-0414 (0721), Specification for EDA Common Metadata |
| 7183 | Cycle 2-2024 | DDA TF | Revision to Add a New Subordinate Standard: Specification for EDA Common Metadata for Control Job Management to SEMI E164-0414 (0721), Specification for EDA Common Metadata |
| 7184 | Cycle 2-2024 | DDA TF | Revision to Add a New Subordinate Standard: Specification for EDA Common Metadata for Equipment Performance Tracker to SEMI E164-0414 (0721), Specification for EDA Common Metadata |
| 7185 | Cycle 2-2024 | DDA TF | Revision to Add a New Subordinate Standard: Specification for EDA Common Metadata for Time Synchronization and Definition of the TS-Clock Object to SEMI E164-0414 (0721), Specification for EDA Common Metadata |
| 7186 | Cycle 2-2024 | DDA TF | Revision to Add a New Subordinate Standard: Specification for EDA Common Metadata for Module Process Tracking to SEMI E164-0414 (0721), Specification for EDA Common Metadata |
SNARF(s) Granted a One-Year Extension
# | TF | Title | Expiration Date |
| 6743 | GUI TF | Revision to SEMI E95-1101, Specification for Human Interface for Semiconductor Manufacturing Equipment | 11/8/2024 |
SNARF(s) Cancelled
# | TF | Title |
| 6565 | CDS TF | New Standard: Specification for Application Accesslisting |
| 6949 | Sensor Bus TF | Line Item Revisions to SEMI E54, SEMI E54.1, SEMI E54.10, SEMI E54.11, SEMI E54.12, SEMI E54.13, SEMI E54.14, SEMI E54.15, SEMI E54.16, SEMI E54.17, SEMI E54.18, SEMI E54.19, SEMI E54.2, SEMI E54.20, SEMI E54.21, SEMI E54.22, SEMI E54.23, SEMI E54.24, SEMI E54.3, SEMI E54.4, SEMI E54.7, SEMI E54.8, SEMI E54.9 |
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
Monday, March 25, 2024
- 9:00-10:00 – NA I&C Leadership Meeting
- 10:00-12:00 – ABFI Task Force
- 13:00-15:30 – DDA Task Force
- 15:30-17:30 – EDP Task Force
Tuesday, March 26, 2024
- 8:00-10:00 – GUI Task Force
- 10:00-11:00 – ESEC Task Force
- 11:00-12:00 – PCS Task Force
- 13:00-14:30 – GEM300 Task Force
- 14:30-16:00 – Sensor Bus Task Force
- 16:00-17:30 – CDS Task Force
Wednesday, March 27, 2024
- 9:00-12:00, 13:00-16:00 – I&C NA TC Chapter Meeting
Thursday, March 28, 2024
- 9:00-17:00 – DDA Software Vendor Test
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